Matches in SemOpenAlex for { <https://semopenalex.org/work/W2048231247> ?p ?o ?g. }
Showing items 1 to 67 of
67
with 100 items per page.
- W2048231247 endingPage "48" @default.
- W2048231247 startingPage "45" @default.
- W2048231247 abstract "Abstract The surface morphology of silicon substrates and their optical properties have been investigated after ion implantation by three Mg+ fluencies (Φ = 6×1015 cm-2, 1×1016 cm-2 and 6×1016 cm-2) and pulsed ion-beam treatment (PIBT) with three energy densities (W = 0.5, 1.0 and 1.5 J/cm2). Magnesium ion implantation into Si(111) substrates at room temperature results in the formation of smooth amorphous silicon layer with thickness of about 0.15 Φm containing amorphous non-stoichiometric magnesium silicide. Subsequent nanosecond PIBT leads to crystallization silicon and synthesis Mg2Si precipitates. The optimum conditions of ion implantation and PIBT leading to silicon crystallization and Mg2Si conservation within the implanted layer are determined (Φ = 6Φ1016 cm-2 and W = 0.5-1.0 J/cm2)." @default.
- W2048231247 created "2016-06-24" @default.
- W2048231247 creator A5027421093 @default.
- W2048231247 creator A5056659791 @default.
- W2048231247 creator A5064969522 @default.
- W2048231247 creator A5069896886 @default.
- W2048231247 creator A5031287585 @default.
- W2048231247 date "2012-01-01" @default.
- W2048231247 modified "2023-10-17" @default.
- W2048231247 title "Synthesis of Mg2Si precipitates in Mg-implanted silicon by pulsed ion-beam treatment" @default.
- W2048231247 cites W1664977454 @default.
- W2048231247 cites W1989949490 @default.
- W2048231247 cites W2044262736 @default.
- W2048231247 cites W2087115201 @default.
- W2048231247 cites W2495639333 @default.
- W2048231247 doi "https://doi.org/10.1016/j.phpro.2012.01.012" @default.
- W2048231247 hasPublicationYear "2012" @default.
- W2048231247 type Work @default.
- W2048231247 sameAs 2048231247 @default.
- W2048231247 citedByCount "2" @default.
- W2048231247 countsByYear W20482312472020 @default.
- W2048231247 countsByYear W20482312472022 @default.
- W2048231247 crossrefType "journal-article" @default.
- W2048231247 hasAuthorship W2048231247A5027421093 @default.
- W2048231247 hasAuthorship W2048231247A5031287585 @default.
- W2048231247 hasAuthorship W2048231247A5056659791 @default.
- W2048231247 hasAuthorship W2048231247A5064969522 @default.
- W2048231247 hasAuthorship W2048231247A5069896886 @default.
- W2048231247 hasBestOaLocation W20482312471 @default.
- W2048231247 hasConcept C120665830 @default.
- W2048231247 hasConcept C121332964 @default.
- W2048231247 hasConcept C145148216 @default.
- W2048231247 hasConcept C168834538 @default.
- W2048231247 hasConcept C192562407 @default.
- W2048231247 hasConcept C49040817 @default.
- W2048231247 hasConcept C50774322 @default.
- W2048231247 hasConcept C544956773 @default.
- W2048231247 hasConcept C62520636 @default.
- W2048231247 hasConceptScore W2048231247C120665830 @default.
- W2048231247 hasConceptScore W2048231247C121332964 @default.
- W2048231247 hasConceptScore W2048231247C145148216 @default.
- W2048231247 hasConceptScore W2048231247C168834538 @default.
- W2048231247 hasConceptScore W2048231247C192562407 @default.
- W2048231247 hasConceptScore W2048231247C49040817 @default.
- W2048231247 hasConceptScore W2048231247C50774322 @default.
- W2048231247 hasConceptScore W2048231247C544956773 @default.
- W2048231247 hasConceptScore W2048231247C62520636 @default.
- W2048231247 hasLocation W20482312471 @default.
- W2048231247 hasOpenAccess W2048231247 @default.
- W2048231247 hasPrimaryLocation W20482312471 @default.
- W2048231247 hasRelatedWork W1990089368 @default.
- W2048231247 hasRelatedWork W2012536327 @default.
- W2048231247 hasRelatedWork W2020570780 @default.
- W2048231247 hasRelatedWork W2021234234 @default.
- W2048231247 hasRelatedWork W2051507316 @default.
- W2048231247 hasRelatedWork W2073133358 @default.
- W2048231247 hasRelatedWork W2084616009 @default.
- W2048231247 hasRelatedWork W2093455546 @default.
- W2048231247 hasRelatedWork W2186180634 @default.
- W2048231247 hasRelatedWork W2384925992 @default.
- W2048231247 hasVolume "23" @default.
- W2048231247 isParatext "false" @default.
- W2048231247 isRetracted "false" @default.
- W2048231247 magId "2048231247" @default.
- W2048231247 workType "article" @default.