Matches in SemOpenAlex for { <https://semopenalex.org/work/W2048243009> ?p ?o ?g. }
Showing items 1 to 64 of
64
with 100 items per page.
- W2048243009 abstract "This paper describes the results obtained from studies of deep-UV lithographic properties of resists which utilize chemical amplification in novolac resins. These studies have shown that three-component novolac-based systems are surprisingly effective as deep-UV resists despite the high opacity of novolac at 254 nm. Analytical results are described which have measured the amount of Bronsted acid produced in chemical amplification resist films. The minimum acid concentration necessary for acceptable dissolution rates is far less than the corresponding active species content necessary for the proper functioning of diazoketone-novolac deep-UV resists." @default.
- W2048243009 created "2016-06-24" @default.
- W2048243009 creator A5009564795 @default.
- W2048243009 creator A5027381116 @default.
- W2048243009 creator A5041285546 @default.
- W2048243009 creator A5068818684 @default.
- W2048243009 date "1988-01-01" @default.
- W2048243009 modified "2023-10-03" @default.
- W2048243009 title "Novolac Based Deep-UV Resists" @default.
- W2048243009 doi "https://doi.org/10.1117/12.968302" @default.
- W2048243009 hasPublicationYear "1988" @default.
- W2048243009 type Work @default.
- W2048243009 sameAs 2048243009 @default.
- W2048243009 citedByCount "12" @default.
- W2048243009 countsByYear W20482430092013 @default.
- W2048243009 countsByYear W20482430092022 @default.
- W2048243009 crossrefType "proceedings-article" @default.
- W2048243009 hasAuthorship W2048243009A5009564795 @default.
- W2048243009 hasAuthorship W2048243009A5027381116 @default.
- W2048243009 hasAuthorship W2048243009A5041285546 @default.
- W2048243009 hasAuthorship W2048243009A5068818684 @default.
- W2048243009 hasConcept C120665830 @default.
- W2048243009 hasConcept C121332964 @default.
- W2048243009 hasConcept C127413603 @default.
- W2048243009 hasConcept C134406635 @default.
- W2048243009 hasConcept C171250308 @default.
- W2048243009 hasConcept C192562407 @default.
- W2048243009 hasConcept C204223013 @default.
- W2048243009 hasConcept C2779227376 @default.
- W2048243009 hasConcept C42360764 @default.
- W2048243009 hasConcept C49040817 @default.
- W2048243009 hasConcept C53524968 @default.
- W2048243009 hasConcept C60056205 @default.
- W2048243009 hasConcept C88380143 @default.
- W2048243009 hasConceptScore W2048243009C120665830 @default.
- W2048243009 hasConceptScore W2048243009C121332964 @default.
- W2048243009 hasConceptScore W2048243009C127413603 @default.
- W2048243009 hasConceptScore W2048243009C134406635 @default.
- W2048243009 hasConceptScore W2048243009C171250308 @default.
- W2048243009 hasConceptScore W2048243009C192562407 @default.
- W2048243009 hasConceptScore W2048243009C204223013 @default.
- W2048243009 hasConceptScore W2048243009C2779227376 @default.
- W2048243009 hasConceptScore W2048243009C42360764 @default.
- W2048243009 hasConceptScore W2048243009C49040817 @default.
- W2048243009 hasConceptScore W2048243009C53524968 @default.
- W2048243009 hasConceptScore W2048243009C60056205 @default.
- W2048243009 hasConceptScore W2048243009C88380143 @default.
- W2048243009 hasLocation W20482430091 @default.
- W2048243009 hasOpenAccess W2048243009 @default.
- W2048243009 hasPrimaryLocation W20482430091 @default.
- W2048243009 hasRelatedWork W1972916030 @default.
- W2048243009 hasRelatedWork W1982452378 @default.
- W2048243009 hasRelatedWork W1988143807 @default.
- W2048243009 hasRelatedWork W1996143853 @default.
- W2048243009 hasRelatedWork W2038583106 @default.
- W2048243009 hasRelatedWork W2056584612 @default.
- W2048243009 hasRelatedWork W2092760259 @default.
- W2048243009 hasRelatedWork W2130742640 @default.
- W2048243009 hasRelatedWork W2135899712 @default.
- W2048243009 hasRelatedWork W3215358519 @default.
- W2048243009 isParatext "false" @default.
- W2048243009 isRetracted "false" @default.
- W2048243009 magId "2048243009" @default.
- W2048243009 workType "article" @default.