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- W2048283921 abstract "A picosecond excimer laser-plasma source has been constructed which generates an x-ray average power of 2.2 Watt and 1.4 Watt at the wavelengths required for proximity x-ray lithography: 1.4 nm (steel target) and 1 nm (copper target), respectively. The plasma source could be scaled to the 50 - 75 W x-ray average power required for industrial lithographic production by scaling the total average power of the commercial excimer laser system up to 1 kW. The 1 nm x-ray source is used to micromachine a 2.5 THz microwave waveguide-cavity package with a 48 micrometers deep, 3D structure, using the LIGA technique." @default.
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- W2048283921 date "1998-07-02" @default.
- W2048283921 modified "2023-10-15" @default.
- W2048283921 title "X-ray micromachining with a laser-plasma source at 1-nm wavelength" @default.
- W2048283921 doi "https://doi.org/10.1117/12.312747" @default.
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