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- W2048386430 abstract "We describe the characterization and optimization of a two step nitride etch process in a hexode reactor by Design of Experiments and Statistical Process Control methods. Through optimization, better process control is achieved thus allowing a more robust process. Response Surface Analysis of a full factorial screening experiment with four factors points towards using a two step process of using first a CHF3-rich CHF3/O2 gas mixture with high nitride to photoresist selectivity but low nitride to oxide selectivity followed by a second step with high nitride to oxide selectivity but low nitride to photoresist selectivity. Further optimization of the nitride etch rate and uniformity through the path of steepest ascent method is investigated. The process recipe thus developed was used for etching gate and source patterns in a 0.9 micron CMOS TWIN TUB technology for 125 and 150 mm wafers in a commercial hexode. Penetration of the thin pad oxide is about 30+ /- 10A. The highest nitride to oxide selectivity for the second step is about 12 to 1 at an approximate 10% CHF3/90% 02 gas mixture. Statistical process control is demonstrated." @default.
- W2048386430 created "2016-06-24" @default.
- W2048386430 creator A5022001444 @default.
- W2048386430 creator A5064066061 @default.
- W2048386430 creator A5086096817 @default.
- W2048386430 date "1990-01-30" @default.
- W2048386430 modified "2023-09-23" @default.
- W2048386430 title "Optimization Of A Highly Selective Nitride/Oxide Rie In A Batch Etching Machine By Statistical Analysis" @default.
- W2048386430 doi "https://doi.org/10.1117/12.978061" @default.
- W2048386430 hasPublicationYear "1990" @default.
- W2048386430 type Work @default.
- W2048386430 sameAs 2048386430 @default.
- W2048386430 citedByCount "0" @default.
- W2048386430 crossrefType "proceedings-article" @default.
- W2048386430 hasAuthorship W2048386430A5022001444 @default.
- W2048386430 hasAuthorship W2048386430A5064066061 @default.
- W2048386430 hasAuthorship W2048386430A5086096817 @default.
- W2048386430 hasConcept C115952470 @default.
- W2048386430 hasConcept C118792377 @default.
- W2048386430 hasConcept C127413603 @default.
- W2048386430 hasConcept C134406635 @default.
- W2048386430 hasConcept C160671074 @default.
- W2048386430 hasConcept C161790260 @default.
- W2048386430 hasConcept C171250308 @default.
- W2048386430 hasConcept C178790620 @default.
- W2048386430 hasConcept C185592680 @default.
- W2048386430 hasConcept C191897082 @default.
- W2048386430 hasConcept C192562407 @default.
- W2048386430 hasConcept C194760766 @default.
- W2048386430 hasConcept C2779227376 @default.
- W2048386430 hasConcept C2779851234 @default.
- W2048386430 hasConcept C42360764 @default.
- W2048386430 hasConcept C49040817 @default.
- W2048386430 hasConceptScore W2048386430C115952470 @default.
- W2048386430 hasConceptScore W2048386430C118792377 @default.
- W2048386430 hasConceptScore W2048386430C127413603 @default.
- W2048386430 hasConceptScore W2048386430C134406635 @default.
- W2048386430 hasConceptScore W2048386430C160671074 @default.
- W2048386430 hasConceptScore W2048386430C161790260 @default.
- W2048386430 hasConceptScore W2048386430C171250308 @default.
- W2048386430 hasConceptScore W2048386430C178790620 @default.
- W2048386430 hasConceptScore W2048386430C185592680 @default.
- W2048386430 hasConceptScore W2048386430C191897082 @default.
- W2048386430 hasConceptScore W2048386430C192562407 @default.
- W2048386430 hasConceptScore W2048386430C194760766 @default.
- W2048386430 hasConceptScore W2048386430C2779227376 @default.
- W2048386430 hasConceptScore W2048386430C2779851234 @default.
- W2048386430 hasConceptScore W2048386430C42360764 @default.
- W2048386430 hasConceptScore W2048386430C49040817 @default.
- W2048386430 hasLocation W20483864301 @default.
- W2048386430 hasOpenAccess W2048386430 @default.
- W2048386430 hasPrimaryLocation W20483864301 @default.
- W2048386430 hasRelatedWork W1983005224 @default.
- W2048386430 hasRelatedWork W1986872787 @default.
- W2048386430 hasRelatedWork W2007060010 @default.
- W2048386430 hasRelatedWork W2012051757 @default.
- W2048386430 hasRelatedWork W2110545200 @default.
- W2048386430 hasRelatedWork W2466623488 @default.
- W2048386430 hasRelatedWork W2555649254 @default.
- W2048386430 hasRelatedWork W2759376314 @default.
- W2048386430 hasRelatedWork W2241029470 @default.
- W2048386430 hasRelatedWork W2252959161 @default.
- W2048386430 hasRelatedWork W2413511907 @default.
- W2048386430 hasRelatedWork W2757067741 @default.
- W2048386430 hasRelatedWork W2828034675 @default.
- W2048386430 hasRelatedWork W2833875567 @default.
- W2048386430 hasRelatedWork W2869059800 @default.
- W2048386430 hasRelatedWork W2873121973 @default.
- W2048386430 hasRelatedWork W3003060989 @default.
- W2048386430 hasRelatedWork W3089859399 @default.
- W2048386430 hasRelatedWork W3129761922 @default.
- W2048386430 hasRelatedWork W3136927672 @default.
- W2048386430 isParatext "false" @default.
- W2048386430 isRetracted "false" @default.
- W2048386430 magId "2048386430" @default.
- W2048386430 workType "article" @default.