Matches in SemOpenAlex for { <https://semopenalex.org/work/W2048392431> ?p ?o ?g. }
Showing items 1 to 71 of
71
with 100 items per page.
- W2048392431 endingPage "04C045" @default.
- W2048392431 startingPage "04C045" @default.
- W2048392431 abstract "A two-step source/drain elevated epitaxial process for ultra thin fully depleted (FD) silicon-on-insulator (SOI) metal–oxide–semiconductor field-effect transistors (MOSFETs) is proposed. The relation between the crystal quality of the source/drain extension regions and channel orientation with the silicon epitaxial process is analyzed by transmission electron microscopy (TEM). No defect is observed in the source/drain extension regions on the <100> channel, whereas crystal defects are observed on the <110> channel. Crystal defect generation in the source/drain extension regions is closely related to channel orientation. Moreover, a low parasitic resistance of thin-body SOI MOSFETs is realized in <100> channel SOI-MOSFET, and high Ion(Ids)–Ioff characteristics and the suppression of the roll-off characteristics of thin-body SOI MOSFETs with the <100> channel orientation are shown. It is confirmed that thin-body SOI MOSFETs with a two-step source/drain elevated epitaxial process have a high potential for the application in the 22 nm generation." @default.
- W2048392431 created "2016-06-24" @default.
- W2048392431 creator A5026538913 @default.
- W2048392431 creator A5030385795 @default.
- W2048392431 creator A5030736937 @default.
- W2048392431 creator A5086416593 @default.
- W2048392431 creator A5087292580 @default.
- W2048392431 date "2009-04-20" @default.
- W2048392431 modified "2023-09-25" @default.
- W2048392431 title "Electrical Characteristics and Crystal Quality Analysis of Thin-Body <100> Channel Silicon-on-Insulator Metal–Oxide–Semiconductor Field-Effect Transistors Using Two-Step Elevated Silicon Epitaxial Process" @default.
- W2048392431 cites W2075799137 @default.
- W2048392431 cites W2087959102 @default.
- W2048392431 doi "https://doi.org/10.1143/jjap.48.04c045" @default.
- W2048392431 hasPublicationYear "2009" @default.
- W2048392431 type Work @default.
- W2048392431 sameAs 2048392431 @default.
- W2048392431 citedByCount "1" @default.
- W2048392431 countsByYear W20483924312017 @default.
- W2048392431 crossrefType "journal-article" @default.
- W2048392431 hasAuthorship W2048392431A5026538913 @default.
- W2048392431 hasAuthorship W2048392431A5030385795 @default.
- W2048392431 hasAuthorship W2048392431A5030736937 @default.
- W2048392431 hasAuthorship W2048392431A5086416593 @default.
- W2048392431 hasAuthorship W2048392431A5087292580 @default.
- W2048392431 hasConcept C110738630 @default.
- W2048392431 hasConcept C119599485 @default.
- W2048392431 hasConcept C127413603 @default.
- W2048392431 hasConcept C145598152 @default.
- W2048392431 hasConcept C165801399 @default.
- W2048392431 hasConcept C171250308 @default.
- W2048392431 hasConcept C172385210 @default.
- W2048392431 hasConcept C192562407 @default.
- W2048392431 hasConcept C2778413303 @default.
- W2048392431 hasConcept C2779227376 @default.
- W2048392431 hasConcept C49040817 @default.
- W2048392431 hasConcept C53143962 @default.
- W2048392431 hasConcept C544956773 @default.
- W2048392431 hasConceptScore W2048392431C110738630 @default.
- W2048392431 hasConceptScore W2048392431C119599485 @default.
- W2048392431 hasConceptScore W2048392431C127413603 @default.
- W2048392431 hasConceptScore W2048392431C145598152 @default.
- W2048392431 hasConceptScore W2048392431C165801399 @default.
- W2048392431 hasConceptScore W2048392431C171250308 @default.
- W2048392431 hasConceptScore W2048392431C172385210 @default.
- W2048392431 hasConceptScore W2048392431C192562407 @default.
- W2048392431 hasConceptScore W2048392431C2778413303 @default.
- W2048392431 hasConceptScore W2048392431C2779227376 @default.
- W2048392431 hasConceptScore W2048392431C49040817 @default.
- W2048392431 hasConceptScore W2048392431C53143962 @default.
- W2048392431 hasConceptScore W2048392431C544956773 @default.
- W2048392431 hasIssue "4" @default.
- W2048392431 hasLocation W20483924311 @default.
- W2048392431 hasOpenAccess W2048392431 @default.
- W2048392431 hasPrimaryLocation W20483924311 @default.
- W2048392431 hasRelatedWork W2017035144 @default.
- W2048392431 hasRelatedWork W2061052759 @default.
- W2048392431 hasRelatedWork W2073454514 @default.
- W2048392431 hasRelatedWork W2102915790 @default.
- W2048392431 hasRelatedWork W2119951441 @default.
- W2048392431 hasRelatedWork W2534149496 @default.
- W2048392431 hasRelatedWork W2537937582 @default.
- W2048392431 hasRelatedWork W2545121202 @default.
- W2048392431 hasRelatedWork W2735122849 @default.
- W2048392431 hasRelatedWork W2922843507 @default.
- W2048392431 hasVolume "48" @default.
- W2048392431 isParatext "false" @default.
- W2048392431 isRetracted "false" @default.
- W2048392431 magId "2048392431" @default.
- W2048392431 workType "article" @default.