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- W2048436352 abstract "Hierarchical micro-nano structure surface on silicon is directly produced by femtosecond laser in air. The laser processing reduces the reflectance of silicon significantly in the studied wavelength range (0.25-1.1 μm). Mechanical durability of the micro-nano structure surface has been studied. It is indicated that wear is significantly reduced under water saturation lubrication. Moreover surface modification with Perfluoropolyether improves its mechanical durability." @default.
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- W2048436352 date "2013-04-01" @default.
- W2048436352 modified "2023-09-27" @default.
- W2048436352 title "Mechanical durability of micro-nano structures surface of black silicon produced by femtosecond laser" @default.
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- W2048436352 doi "https://doi.org/10.1109/nems.2013.6559938" @default.
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