Matches in SemOpenAlex for { <https://semopenalex.org/work/W2048486550> ?p ?o ?g. }
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- W2048486550 endingPage "101" @default.
- W2048486550 startingPage "97" @default.
- W2048486550 abstract "Time-resolved UV spectroscopy has been used to detect species formed in the laser deposition of titanium from titanium tetrachloride at the entrance window of the reactor. The deposition involves primarily the decomposition of the adsorbed TiCl4 molecules. The primary decomposition products at low laser fluences are TiCl3 and chlorine atoms. Chlorine molecules detected in the gas phase close to the surface of the entrance window are formed through recombination of chlorine atoms. Absorption of further photons leads to the splitting off of chlorine atoms from TiCl3 with the formation of a titanium film. At high laser fluences, titanium atoms and chlorine molecules can be formed directly in a time period of less than 20 ns." @default.
- W2048486550 created "2016-06-24" @default.
- W2048486550 creator A5033315315 @default.
- W2048486550 creator A5069860627 @default.
- W2048486550 date "1993-02-01" @default.
- W2048486550 modified "2023-09-24" @default.
- W2048486550 title "Study of the formation of titanium deposit in the excimer-laser decomposition of titanium tetrachloride by time-resolved UV spectroscopy" @default.
- W2048486550 cites W1569598449 @default.
- W2048486550 cites W2051660827 @default.
- W2048486550 cites W2057457294 @default.
- W2048486550 cites W2073666854 @default.
- W2048486550 cites W2073790903 @default.
- W2048486550 cites W2086255468 @default.
- W2048486550 cites W2147189993 @default.
- W2048486550 cites W2513623065 @default.
- W2048486550 cites W393078550 @default.
- W2048486550 doi "https://doi.org/10.1016/0169-4332(93)90269-h" @default.
- W2048486550 hasPublicationYear "1993" @default.
- W2048486550 type Work @default.
- W2048486550 sameAs 2048486550 @default.
- W2048486550 citedByCount "3" @default.
- W2048486550 crossrefType "journal-article" @default.
- W2048486550 hasAuthorship W2048486550A5033315315 @default.
- W2048486550 hasAuthorship W2048486550A5069860627 @default.
- W2048486550 hasConcept C113196181 @default.
- W2048486550 hasConcept C119824511 @default.
- W2048486550 hasConcept C120665830 @default.
- W2048486550 hasConcept C121332964 @default.
- W2048486550 hasConcept C124681953 @default.
- W2048486550 hasConcept C151730666 @default.
- W2048486550 hasConcept C178790620 @default.
- W2048486550 hasConcept C179104552 @default.
- W2048486550 hasConcept C185592680 @default.
- W2048486550 hasConcept C192562407 @default.
- W2048486550 hasConcept C2777510880 @default.
- W2048486550 hasConcept C2778179251 @default.
- W2048486550 hasConcept C2780477314 @default.
- W2048486550 hasConcept C2816523 @default.
- W2048486550 hasConcept C32891209 @default.
- W2048486550 hasConcept C32909587 @default.
- W2048486550 hasConcept C505241676 @default.
- W2048486550 hasConcept C506065880 @default.
- W2048486550 hasConcept C520434653 @default.
- W2048486550 hasConcept C525849907 @default.
- W2048486550 hasConcept C62520636 @default.
- W2048486550 hasConcept C64297162 @default.
- W2048486550 hasConcept C74561354 @default.
- W2048486550 hasConcept C75473681 @default.
- W2048486550 hasConcept C86803240 @default.
- W2048486550 hasConceptScore W2048486550C113196181 @default.
- W2048486550 hasConceptScore W2048486550C119824511 @default.
- W2048486550 hasConceptScore W2048486550C120665830 @default.
- W2048486550 hasConceptScore W2048486550C121332964 @default.
- W2048486550 hasConceptScore W2048486550C124681953 @default.
- W2048486550 hasConceptScore W2048486550C151730666 @default.
- W2048486550 hasConceptScore W2048486550C178790620 @default.
- W2048486550 hasConceptScore W2048486550C179104552 @default.
- W2048486550 hasConceptScore W2048486550C185592680 @default.
- W2048486550 hasConceptScore W2048486550C192562407 @default.
- W2048486550 hasConceptScore W2048486550C2777510880 @default.
- W2048486550 hasConceptScore W2048486550C2778179251 @default.
- W2048486550 hasConceptScore W2048486550C2780477314 @default.
- W2048486550 hasConceptScore W2048486550C2816523 @default.
- W2048486550 hasConceptScore W2048486550C32891209 @default.
- W2048486550 hasConceptScore W2048486550C32909587 @default.
- W2048486550 hasConceptScore W2048486550C505241676 @default.
- W2048486550 hasConceptScore W2048486550C506065880 @default.
- W2048486550 hasConceptScore W2048486550C520434653 @default.
- W2048486550 hasConceptScore W2048486550C525849907 @default.
- W2048486550 hasConceptScore W2048486550C62520636 @default.
- W2048486550 hasConceptScore W2048486550C64297162 @default.
- W2048486550 hasConceptScore W2048486550C74561354 @default.
- W2048486550 hasConceptScore W2048486550C75473681 @default.
- W2048486550 hasConceptScore W2048486550C86803240 @default.
- W2048486550 hasIssue "2" @default.
- W2048486550 hasLocation W20484865501 @default.
- W2048486550 hasOpenAccess W2048486550 @default.
- W2048486550 hasPrimaryLocation W20484865501 @default.
- W2048486550 hasRelatedWork W1978898557 @default.
- W2048486550 hasRelatedWork W1992416354 @default.
- W2048486550 hasRelatedWork W2016171641 @default.
- W2048486550 hasRelatedWork W2028931899 @default.
- W2048486550 hasRelatedWork W2033728294 @default.
- W2048486550 hasRelatedWork W2045809563 @default.
- W2048486550 hasRelatedWork W2048486550 @default.
- W2048486550 hasRelatedWork W2057457294 @default.
- W2048486550 hasRelatedWork W2080599712 @default.
- W2048486550 hasRelatedWork W2511234578 @default.
- W2048486550 hasVolume "64" @default.
- W2048486550 isParatext "false" @default.
- W2048486550 isRetracted "false" @default.
- W2048486550 magId "2048486550" @default.
- W2048486550 workType "article" @default.