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- W2048748130 abstract "Abstract A hot-cathode Penning-discharge sputtering (HC-PDS) apparatus has been newly developed, which normally operates at an Ar gas pressure of 10−4 Torr and provides a high-density ion flux even at low target voltages below −0.10 kV. As one performance test, we tried sputter-depositions from Mo, W, and Ta refractory metals. By means of PIXE analysis, it was found that argon was incorporated, but its concentration was estimated to be less than 2 at%, while other impurities coming from the construction materials of the HC-PDS apparatus could be reduced to as low as 1 at%. An attempt was made to fabricate a high-Tc superconducting Y Ba Cu O film from a single target. A film close to the nominal composition ratio of the target was obtained at lower pressures of around 1 × 10−3 Torr." @default.
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- W2048748130 date "1991-01-01" @default.
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- W2048748130 title "Sputter-deposition by a new Penning-discharge source with an axially integrated hot-cathode" @default.
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- W2048748130 doi "https://doi.org/10.1016/0169-4332(91)90360-v" @default.
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