Matches in SemOpenAlex for { <https://semopenalex.org/work/W2048752020> ?p ?o ?g. }
Showing items 1 to 86 of
86
with 100 items per page.
- W2048752020 endingPage "8409" @default.
- W2048752020 startingPage "8409" @default.
- W2048752020 abstract "In extreme ultraviolet (EUV) lithography, off-axis incident light on a reflective mask causes asymmetry of contrast in the edges of patterns with the critical dimension (CD) and a shift in the center position of the printed image of a line-and-space pattern, even if the line-and-space pattern has perfect symmetry and is correctly placed on a mask. In this study, we analyzed the asymmetry of the pattern edge contrast of line-and-space patterns using light intensity distribution functions which is obtained by taking inverse Fourier transform of the diffracted rays passing through the pupil. The results showed that, when only 0th- and ±1st-order diffracted rays pass through the pupil, the printed image tends to be symmetrical, regardless of any asymmetry in the amplitude and phase of the diffracted rays; but when 0th-, ±1st-, and ± n th-order ( n ≧2) diffracted rays pass through the pupil, the printed image tends to be asymmetrical." @default.
- W2048752020 created "2016-06-24" @default.
- W2048752020 creator A5010757568 @default.
- W2048752020 creator A5076937568 @default.
- W2048752020 creator A5081284897 @default.
- W2048752020 date "2005-12-01" @default.
- W2048752020 modified "2023-09-23" @default.
- W2048752020 title "Analysis of Asymmetry of Printed Image by Off-Axis Incident Light onto Reflective Mask in Extreme Ultraviolet Lithography" @default.
- W2048752020 cites W1594489858 @default.
- W2048752020 cites W1969559622 @default.
- W2048752020 cites W2023543647 @default.
- W2048752020 cites W2030803035 @default.
- W2048752020 cites W2042790089 @default.
- W2048752020 cites W2096861910 @default.
- W2048752020 cites W2125556313 @default.
- W2048752020 cites W2127305659 @default.
- W2048752020 cites W2142063750 @default.
- W2048752020 cites W2153079984 @default.
- W2048752020 cites W4241214195 @default.
- W2048752020 doi "https://doi.org/10.1143/jjap.44.8409" @default.
- W2048752020 hasPublicationYear "2005" @default.
- W2048752020 type Work @default.
- W2048752020 sameAs 2048752020 @default.
- W2048752020 citedByCount "12" @default.
- W2048752020 countsByYear W20487520202014 @default.
- W2048752020 crossrefType "journal-article" @default.
- W2048752020 hasAuthorship W2048752020A5010757568 @default.
- W2048752020 hasAuthorship W2048752020A5076937568 @default.
- W2048752020 hasAuthorship W2048752020A5081284897 @default.
- W2048752020 hasConcept C102519508 @default.
- W2048752020 hasConcept C120665830 @default.
- W2048752020 hasConcept C121332964 @default.
- W2048752020 hasConcept C146024833 @default.
- W2048752020 hasConcept C146617872 @default.
- W2048752020 hasConcept C160671074 @default.
- W2048752020 hasConcept C162996421 @default.
- W2048752020 hasConcept C182610534 @default.
- W2048752020 hasConcept C198352243 @default.
- W2048752020 hasConcept C204223013 @default.
- W2048752020 hasConcept C207114421 @default.
- W2048752020 hasConcept C2524010 @default.
- W2048752020 hasConcept C33923547 @default.
- W2048752020 hasConcept C33995572 @default.
- W2048752020 hasConcept C38976095 @default.
- W2048752020 hasConcept C49040817 @default.
- W2048752020 hasConcept C520434653 @default.
- W2048752020 hasConcept C62520636 @default.
- W2048752020 hasConceptScore W2048752020C102519508 @default.
- W2048752020 hasConceptScore W2048752020C120665830 @default.
- W2048752020 hasConceptScore W2048752020C121332964 @default.
- W2048752020 hasConceptScore W2048752020C146024833 @default.
- W2048752020 hasConceptScore W2048752020C146617872 @default.
- W2048752020 hasConceptScore W2048752020C160671074 @default.
- W2048752020 hasConceptScore W2048752020C162996421 @default.
- W2048752020 hasConceptScore W2048752020C182610534 @default.
- W2048752020 hasConceptScore W2048752020C198352243 @default.
- W2048752020 hasConceptScore W2048752020C204223013 @default.
- W2048752020 hasConceptScore W2048752020C207114421 @default.
- W2048752020 hasConceptScore W2048752020C2524010 @default.
- W2048752020 hasConceptScore W2048752020C33923547 @default.
- W2048752020 hasConceptScore W2048752020C33995572 @default.
- W2048752020 hasConceptScore W2048752020C38976095 @default.
- W2048752020 hasConceptScore W2048752020C49040817 @default.
- W2048752020 hasConceptScore W2048752020C520434653 @default.
- W2048752020 hasConceptScore W2048752020C62520636 @default.
- W2048752020 hasIssue "12R" @default.
- W2048752020 hasLocation W20487520201 @default.
- W2048752020 hasOpenAccess W2048752020 @default.
- W2048752020 hasPrimaryLocation W20487520201 @default.
- W2048752020 hasRelatedWork W1226996237 @default.
- W2048752020 hasRelatedWork W1484372306 @default.
- W2048752020 hasRelatedWork W1573549979 @default.
- W2048752020 hasRelatedWork W2048752020 @default.
- W2048752020 hasRelatedWork W2050243074 @default.
- W2048752020 hasRelatedWork W2089259287 @default.
- W2048752020 hasRelatedWork W2124026730 @default.
- W2048752020 hasRelatedWork W2130809458 @default.
- W2048752020 hasRelatedWork W3045263584 @default.
- W2048752020 hasRelatedWork W3053914760 @default.
- W2048752020 hasVolume "44" @default.
- W2048752020 isParatext "false" @default.
- W2048752020 isRetracted "false" @default.
- W2048752020 magId "2048752020" @default.
- W2048752020 workType "article" @default.