Matches in SemOpenAlex for { <https://semopenalex.org/work/W2048817511> ?p ?o ?g. }
Showing items 1 to 56 of
56
with 100 items per page.
- W2048817511 abstract "Small molecules added to novolak/diazonaphthoquinone based resists plasticize their dry film coatings. This has a significant effect on standing waves reduction. Such additives allow the photo active compounds (PACs) to diffuse at reduced temperatures. Raw dissolution rate data is highly reliable for detecting standing waves. The effect of the additives on standing waves reduction is a direct function of their molar concentration in the film. Additives that are more alkaline soluble than the novolak matrix are generally preferred to avoid reducing the resist photo speed. These additives may cause serious loss in resist inhibition unless the interaction efficiency of the novolak/PAC system is sufficiently high. Non-reflective substrates are necessary to isolate and examine the effect of additives on resist dissolution without thermal or standing wave interferences. Optimal resist formulations using such additives provide high contrast systems with reduced standing waves applied over reflective substrates." @default.
- W2048817511 created "2016-06-24" @default.
- W2048817511 creator A5047196762 @default.
- W2048817511 creator A5055597154 @default.
- W2048817511 date "1996-06-14" @default.
- W2048817511 modified "2023-09-23" @default.
- W2048817511 title "Standing waves reducing additives" @default.
- W2048817511 doi "https://doi.org/10.1117/12.241852" @default.
- W2048817511 hasPublicationYear "1996" @default.
- W2048817511 type Work @default.
- W2048817511 sameAs 2048817511 @default.
- W2048817511 citedByCount "0" @default.
- W2048817511 crossrefType "proceedings-article" @default.
- W2048817511 hasAuthorship W2048817511A5047196762 @default.
- W2048817511 hasAuthorship W2048817511A5055597154 @default.
- W2048817511 hasConcept C106487976 @default.
- W2048817511 hasConcept C120665830 @default.
- W2048817511 hasConcept C121332964 @default.
- W2048817511 hasConcept C127413603 @default.
- W2048817511 hasConcept C159985019 @default.
- W2048817511 hasConcept C171250308 @default.
- W2048817511 hasConcept C192562407 @default.
- W2048817511 hasConcept C199956316 @default.
- W2048817511 hasConcept C2779227376 @default.
- W2048817511 hasConcept C42360764 @default.
- W2048817511 hasConcept C53524968 @default.
- W2048817511 hasConcept C88380143 @default.
- W2048817511 hasConceptScore W2048817511C106487976 @default.
- W2048817511 hasConceptScore W2048817511C120665830 @default.
- W2048817511 hasConceptScore W2048817511C121332964 @default.
- W2048817511 hasConceptScore W2048817511C127413603 @default.
- W2048817511 hasConceptScore W2048817511C159985019 @default.
- W2048817511 hasConceptScore W2048817511C171250308 @default.
- W2048817511 hasConceptScore W2048817511C192562407 @default.
- W2048817511 hasConceptScore W2048817511C199956316 @default.
- W2048817511 hasConceptScore W2048817511C2779227376 @default.
- W2048817511 hasConceptScore W2048817511C42360764 @default.
- W2048817511 hasConceptScore W2048817511C53524968 @default.
- W2048817511 hasConceptScore W2048817511C88380143 @default.
- W2048817511 hasLocation W20488175111 @default.
- W2048817511 hasOpenAccess W2048817511 @default.
- W2048817511 hasPrimaryLocation W20488175111 @default.
- W2048817511 hasRelatedWork W2011290146 @default.
- W2048817511 hasRelatedWork W2023013010 @default.
- W2048817511 hasRelatedWork W2025634208 @default.
- W2048817511 hasRelatedWork W2038778804 @default.
- W2048817511 hasRelatedWork W2048817511 @default.
- W2048817511 hasRelatedWork W2071082490 @default.
- W2048817511 hasRelatedWork W2088899554 @default.
- W2048817511 hasRelatedWork W3177868708 @default.
- W2048817511 hasRelatedWork W3213320412 @default.
- W2048817511 hasRelatedWork W4236029899 @default.
- W2048817511 isParatext "false" @default.
- W2048817511 isRetracted "false" @default.
- W2048817511 magId "2048817511" @default.
- W2048817511 workType "article" @default.