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- W2048835701 abstract "Purpose The purpose of this paper is to use finite element method for optimizing the membrane type double cavity vacuum sealed structure for the best achievable sensitivity in a piezoresistive absolute pressure sensor and its validation using a standard complementary metal oxide semiconductor (CMOS) process." @default.
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- W2048835701 date "2013-09-09" @default.
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- W2048835701 title "Finite element method based absolute pressure sensitivity optimized membrane type double cavity vacuum sealed piezoresistive sensor" @default.
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