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- W2048836346 abstract "We show results on the progress in the development of MOEMS based FT spectrometers dedicated to operate in the mid-IR. Recent research is performed within an EC-FP7 project with the goal to show the feasibility of miniaturized high performance infrared spectroscopic chemical analyzers. Exploiting the high analyte selectivity of the mid-IR paired with the inherent sensitivity of an FT-IR spectrometer, such devices could be used in a wide range of applications, from air monitoring over in-line real-time process control to security monitoring. For practical applicability in these fields, appropriate detection limits and spectral quality standards have to be met. The presented system aims at a performance to measure in the range between 4000-700 cm<sup>-1</sup> at a spectral resolution better than 10 cm<sup>-1</sup>, which would clearly outmatch previous MOEMS based spectrometer approaches. A further technological advantage is the rapid-scan capability. The MOEMS devices oscillate at 500 Hz. A spectrometer based on this device can acquire 1,000 scans per second in forward-backward mode. The interplay of all these components with the challenges in system integration will be described in detail and experimental results will be shown, presenting a significant step forward in smart spectroscopic sensors, microsystems technology and vibrational spectroscopy instrumentation." @default.
- W2048836346 created "2016-06-24" @default.
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- W2048836346 date "2011-05-13" @default.
- W2048836346 modified "2023-09-24" @default.
- W2048836346 title "A compact and portable IR analyzer: progress of a MOEMS FT-IR system for mid-IR sensing" @default.
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- W2048836346 doi "https://doi.org/10.1117/12.883841" @default.
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