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- W2048851825 abstract "Macroporous silicon is prepared with strongly modulated pore diameter by applying a sawtooth-like illumination profile. Taking into account diffusion limited mass transport, 25 perfectly identical modulations have been achieved, corresponding to a total pore depth of 200 μm. Qualitatively the pore growth may be well characterized by the established model from the literature but for this non-steady-state situation some extensions become necessary. The obtained asymmetric pore profiles make this system an ideal candidate as membranes in particle-size selective micropumps." @default.
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- W2048851825 date "2000-11-01" @default.
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- W2048851825 title "Membranes for Micropumps from Macroporous Silicon" @default.
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- W2048851825 doi "https://doi.org/10.1002/1521-396x(200011)182:1<585::aid-pssa585>3.0.co;2-4" @default.
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