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- W2048894496 abstract "This paper will discuss some of the recent advances in the field of interferometry that have been made at Zygo. In the past year Zygo has introduced five major advances in the interferometry field: the 5500 Heterodyne Profiler, the AXIOM 2/20 distance measuring interferometer, a 450mm phase modulator for large aperture phase interferometry, a phase measuring interferometer at 351nrn and the Mark IV programmable phase measuring interferometer. The presentation will conclude with a general discussion of what Zygo sees for the future of interferometry." @default.
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- W2048894496 date "1987-03-23" @default.
- W2048894496 modified "2023-09-24" @default.
- W2048894496 title "Recent Advances In Interferometry At Zygo" @default.
- W2048894496 doi "https://doi.org/10.1117/12.941758" @default.
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