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- W2048894780 abstract "Vapor sensors using thin porous silicon (PS) Fabry-Pérot films were prepared and characterized. The detection method used in this work involves measurement of the intensity of reflected light from a microporous Si film as a function of analyte concentration. Analyte adsorption within the pores of the film causes the Fabry-Pérot fringes to shift to higher wavelengths as a result of an increase in the average refractive index of the PS layer. Two transduction methodologies are employed: measurement of the intensity of reflected light using a low-power red diode laser source, and measurement of the spectrum of reflected light in the wavelength range 400−1000 nm, using a white light (tungsten) source. The effect of PS film thickness and porosity on sensitivity are systematically studied. A detection limit of 250 ppb for the analyte ethanol in a nitrogen gas carrier stream has been demonstrated. Experimental results suggest that capillary condensation is in part responsible for the high sensitivity of these vapor sensors." @default.
- W2048894780 created "2016-06-24" @default.
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- W2048894780 date "2002-02-08" @default.
- W2048894780 modified "2023-10-01" @default.
- W2048894780 title "Vapor Sensors Based on Optical Interferometry from Oxidized Microporous Silicon Films" @default.
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- W2048894780 doi "https://doi.org/10.1021/la015568f" @default.
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