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- W2048918178 abstract "This paper, the present state and problems of secondary ion mass spectrometry are discussed from the viewpoint of characterization, both for various semiconductor and microelectronic materials and also in relation to other evaluation methods." @default.
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- W2048918178 date "2003-01-01" @default.
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- W2048918178 title "Application of SIMS in microelectronics" @default.
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- W2048918178 doi "https://doi.org/10.1016/s0169-4332(02)00689-x" @default.
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