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- W2049202615 abstract "Depth and profile information of one or two-dimensional photonic crystals can be obtained through measurements of reflective diffractive patters obtained from the structures and subsequent numerical analysis. The technique is known as a scatterometry. The method is non-invasive and fast, and competitive to the alternatives of AFM, SEM etc. In our paper we presented results of investigation 1D photonic crystal fabricated in GaN with period Λ = 400 nm, fill factor ff = 50% and depth d = 400 nm. Using computer algorithm of Rigorous Coupled Wave Analysis (RCWA) and measuring diffracted light we extracted the profile parameters of Λ = 420 nm, ff = 51%, d = 400 nm. Possibility of application of our method for analysis 2D photonic crystals is discussed also." @default.
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- W2049202615 date "2008-04-25" @default.
- W2049202615 modified "2023-09-23" @default.
- W2049202615 title "Quick and non-invasive method for characterisation of profiles of nano-photonics structures" @default.
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- W2049202615 doi "https://doi.org/10.1117/12.785813" @default.
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