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- W2049206043 abstract "This work presents a new electrochemical process for the formation of free-standing macroporous silicon membranes over a large cavity. The developed technique is based on a two-step electrochemical process of silicon dissolution, starting from thick macroPS membrane formation under the appropriate conditions and continuing with different anodization conditions that lead to formation of a nanoporous silicon layer underneath the macroporous membrane. The obtained structure is a double-layer of a macroporous over a nanoporous layer. By selective dissolution of the nanoporous layer, a free-standing macroporous silicon membrane over a large cavity in silicon is obtained. Interesting applications of this micromechanical structure include particle filtering and lab-on-chip devices." @default.
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- W2049206043 date "2006-04-01" @default.
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- W2049206043 title "Free-standing macroporous silicon membranes over a large cavity for filtering and lab-on-chip applications" @default.
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- W2049206043 doi "https://doi.org/10.1016/j.mee.2006.01.065" @default.
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