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- W2049242582 abstract "In this work, a CMOS-compatible membrane-supported micro-bolometer with a front-etched design along the ⟨1 1 0⟩ direction is fabricated. The openings in the absorbing area make etching faster on (1 0 0) planes and form a perfect suspending structure. The experiment shows that the design of ⟨1 0 0⟩-oriented windows in an IR absorbing area together with a thermal sensitive thin film results in short releasing time and good IR absorption. The typical measured responsivity and detectivity of such a bolometer are 8.685 × 103 V W−1 and 2.451 × 108 cm Hz1/2 W−1, respectively. The easy and fast fabrication design makes this structure very suitable for low cost, high performance applications." @default.
- W2049242582 created "2016-06-24" @default.
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- W2049242582 date "2009-02-18" @default.
- W2049242582 modified "2023-09-27" @default.
- W2049242582 title "A ⟨1 0 0⟩ direction front-etched membrane structure for a micro-bolometer" @default.
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- W2049242582 doi "https://doi.org/10.1088/0960-1317/19/3/035022" @default.
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