Matches in SemOpenAlex for { <https://semopenalex.org/work/W2049259509> ?p ?o ?g. }
Showing items 1 to 95 of
95
with 100 items per page.
- W2049259509 endingPage "637" @default.
- W2049259509 startingPage "629" @default.
- W2049259509 abstract "Single crystalline calcium fluoride (CaF2) is designated as optical material in systems for photolithographic processing of silicon ICs at wavelengths in the deep ultraviolet. The prerequisites for this application are a high transmission and a high resistance with respect to radiation damage under high-intensity laser irradiation. Pure CaF2 has excellent transmission properties without absorption bands over a wide wavelength range from UV to IR. Selective absorption bands exist in CaF2 only if the crystal contains impurities. Oxygen is considered as a major impurity in CaF2. In the present contribution incorporation of oxygen during crystal growth and its influence on the optical properties of CaF2 is investigated systematically by a specially designed crystal growth facility and processing. A special gas supply system is used to introduce oxygen directly into the CaF2-melt during crystal growth by a Bridgman-type technique. The concentration of the oxygen in the growth atmosphere and therewith in the crystal was varied over a wide range during growth. The oxygen concentration in the as-grown CaF2-crystal was determined quantitatively by a special characterization technique called elastic recoil detection (ERD). Concentrations between 5 and 144 ppm were detected. Investigations of the optical properties of the oxygen-doped CaF2-crystal revealed that the oxygen causes an increase of the absorption in the UV range with a maximum at 197 nm. The relation between the oxygen concentration in the crystal and the absorption coefficient at 197 nm was found to be linear. This calibration relation can now be used in general for the quantitative determination of the oxygen concentration in CaF2-crystals by absorption measurements at 197 nm. Furthermore, the influence of oxygen on the radiation hardness was examined for X-ray and excimer F2-laser (157 nm) irradiation." @default.
- W2049259509 created "2016-06-24" @default.
- W2049259509 creator A5013163884 @default.
- W2049259509 creator A5047370658 @default.
- W2049259509 creator A5063038566 @default.
- W2049259509 creator A5066076629 @default.
- W2049259509 date "2005-01-01" @default.
- W2049259509 modified "2023-09-27" @default.
- W2049259509 title "Study of the oxygen incorporation during growth of large CaF2-crystals" @default.
- W2049259509 cites W1975584681 @default.
- W2049259509 cites W1991309583 @default.
- W2049259509 cites W1991958344 @default.
- W2049259509 cites W1998723831 @default.
- W2049259509 cites W2022890679 @default.
- W2049259509 cites W2032557175 @default.
- W2049259509 cites W2041541285 @default.
- W2049259509 cites W2094853298 @default.
- W2049259509 doi "https://doi.org/10.1016/j.jcrysgro.2004.09.040" @default.
- W2049259509 hasPublicationYear "2005" @default.
- W2049259509 type Work @default.
- W2049259509 sameAs 2049259509 @default.
- W2049259509 citedByCount "19" @default.
- W2049259509 countsByYear W20492595092012 @default.
- W2049259509 countsByYear W20492595092019 @default.
- W2049259509 countsByYear W20492595092020 @default.
- W2049259509 countsByYear W20492595092021 @default.
- W2049259509 countsByYear W20492595092023 @default.
- W2049259509 crossrefType "journal-article" @default.
- W2049259509 hasAuthorship W2049259509A5013163884 @default.
- W2049259509 hasAuthorship W2049259509A5047370658 @default.
- W2049259509 hasAuthorship W2049259509A5063038566 @default.
- W2049259509 hasAuthorship W2049259509A5066076629 @default.
- W2049259509 hasConcept C113196181 @default.
- W2049259509 hasConcept C119824511 @default.
- W2049259509 hasConcept C120665830 @default.
- W2049259509 hasConcept C121332964 @default.
- W2049259509 hasConcept C125287762 @default.
- W2049259509 hasConcept C159774933 @default.
- W2049259509 hasConcept C159985019 @default.
- W2049259509 hasConcept C178790620 @default.
- W2049259509 hasConcept C185592680 @default.
- W2049259509 hasConcept C192562407 @default.
- W2049259509 hasConcept C199360897 @default.
- W2049259509 hasConcept C26456737 @default.
- W2049259509 hasConcept C2776798109 @default.
- W2049259509 hasConcept C2781285689 @default.
- W2049259509 hasConcept C41008148 @default.
- W2049259509 hasConcept C49040817 @default.
- W2049259509 hasConcept C540031477 @default.
- W2049259509 hasConcept C544956773 @default.
- W2049259509 hasConcept C71987851 @default.
- W2049259509 hasConcept C8010536 @default.
- W2049259509 hasConcept C89169090 @default.
- W2049259509 hasConceptScore W2049259509C113196181 @default.
- W2049259509 hasConceptScore W2049259509C119824511 @default.
- W2049259509 hasConceptScore W2049259509C120665830 @default.
- W2049259509 hasConceptScore W2049259509C121332964 @default.
- W2049259509 hasConceptScore W2049259509C125287762 @default.
- W2049259509 hasConceptScore W2049259509C159774933 @default.
- W2049259509 hasConceptScore W2049259509C159985019 @default.
- W2049259509 hasConceptScore W2049259509C178790620 @default.
- W2049259509 hasConceptScore W2049259509C185592680 @default.
- W2049259509 hasConceptScore W2049259509C192562407 @default.
- W2049259509 hasConceptScore W2049259509C199360897 @default.
- W2049259509 hasConceptScore W2049259509C26456737 @default.
- W2049259509 hasConceptScore W2049259509C2776798109 @default.
- W2049259509 hasConceptScore W2049259509C2781285689 @default.
- W2049259509 hasConceptScore W2049259509C41008148 @default.
- W2049259509 hasConceptScore W2049259509C49040817 @default.
- W2049259509 hasConceptScore W2049259509C540031477 @default.
- W2049259509 hasConceptScore W2049259509C544956773 @default.
- W2049259509 hasConceptScore W2049259509C71987851 @default.
- W2049259509 hasConceptScore W2049259509C8010536 @default.
- W2049259509 hasConceptScore W2049259509C89169090 @default.
- W2049259509 hasIssue "3-4" @default.
- W2049259509 hasLocation W20492595091 @default.
- W2049259509 hasOpenAccess W2049259509 @default.
- W2049259509 hasPrimaryLocation W20492595091 @default.
- W2049259509 hasRelatedWork W1992595145 @default.
- W2049259509 hasRelatedWork W2002651794 @default.
- W2049259509 hasRelatedWork W2012686968 @default.
- W2049259509 hasRelatedWork W2042100673 @default.
- W2049259509 hasRelatedWork W2107044504 @default.
- W2049259509 hasRelatedWork W2194444287 @default.
- W2049259509 hasRelatedWork W2530612596 @default.
- W2049259509 hasRelatedWork W2964670998 @default.
- W2049259509 hasRelatedWork W3135162761 @default.
- W2049259509 hasRelatedWork W4214920076 @default.
- W2049259509 hasVolume "273" @default.
- W2049259509 isParatext "false" @default.
- W2049259509 isRetracted "false" @default.
- W2049259509 magId "2049259509" @default.
- W2049259509 workType "article" @default.