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• W2049402389 abstract "A model is developed, assuming mutation of facet lengths to larger values, to explain the experimental observations of the change in the population distribution of the lengths of facets developed during ion bombardment sputtering erosion of Si. The ensuing Gaussian facet length distribution, with mean length increasing linearly with ion fluence, is then used to show that the depth resolution δz/z0 of interface broadening first increases as z and then tends towards a constant value with increasing z0." @default.
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• W2049402389 date "1985-02-01" @default.
• W2049402389 modified "2023-10-17" @default.
• W2049402389 title "Facet development and its influence on depth resolution during sputtering of Si" @default.
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• W2049402389 doi "https://doi.org/10.1002/sia.740070109" @default.
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