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- W2049505511 abstract "The strain in diamond films deposited on tungsten by the hot filament assisted chemical vapor deposition (CVD) process has been investigated as a function of substrate temperature, methane content, system pressure and gas flow rate by the X-ray diffraction technique. In the thickness range of 4–10 μm, the total macrostrain increases linearly with thickness. The thermal strain is compressive and varies mildly with the temperature. The intrinsicstrain is tensile in nature and increases with increase in deposition temperature (1173–1323 K), system pressure (10–50 Torr), and gas flow rate (40–600 sccm), while it decreases with an increase in the methane content of the input gas mixture (0.1–1.5 vol.%). The microcrystalline strain increases with increasing substrate temperature and gas flow rate but decreases with increasing methane content. It does not correlate with system pressure. Polycrystalline films exhibit preferred orientation. The film texture correlates with deposition temperature, methane content and pressure but not with gas flow rate." @default.
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- W2049505511 date "1992-05-01" @default.
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- W2049505511 title "Strain in CVD diamond films: effects of deposition variables" @default.
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- W2049505511 doi "https://doi.org/10.1016/0040-6090(92)90517-f" @default.
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