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• W2049530034 abstract "A Langmuir probe for the study of high-density RF discharges has been developed and tested in a helicon discharge in which the RF potential ( approximately=100 V) is much larger than the electron temperature ( approximately=4 eV). Carbon probe tips are used to minimize erosion by ion sputtering. Miniature RF chokes located close to the probe tip present RF impedances of 150 k Omega at the operating frequency of 27.12 MHz and 300 k Omega at the first harmonic at 54.24 MHz. It is further necessary to drive the probe tip to follow the RF fluctuations by coupling it to a larger floating electrode. We have been able to measure Te values as low as 3.4 eV in argon plasmas of 1013 cm-3 density; these temperatures are 1.6 eV lower than ones measured by probes with chokes alone, and 2.3 eV lower than measured by uncompensated probes." @default.
• W2049530034 created "2016-06-24" @default.
• W2049530034 creator A5046580836 @default.
• W2049530034 creator A5065961471 @default.
• W2049530034 date "1994-05-01" @default.
• W2049530034 modified "2023-10-01" @default.
• W2049530034 title "RF compensated probes for high-density discharges" @default.
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• W2049530034 doi "https://doi.org/10.1088/0963-0252/3/2/006" @default.
• W2049530034 hasPublicationYear "1994" @default.
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