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• W2049552945 endingPage "676" @default.
• W2049552945 startingPage "666" @default.
• W2049552945 abstract "Pneumatic active anti-vibration apparatuses (AVAs) are widely employed for the highprecision positioning of wafer stages in semiconductor lithography equipment. However, there exists delay of transmission of air supplied to air springs. In this paper, we consider the suppression of vibration caused by the time delay (i.e., dead-time) of AVAs. The dead-time is compensated by using a Smith predictor, which is well-known as a control method for time delay systems. In the implementation of the predictor, the plant model and the dead-time are needed. For this reason, this paper focuses on the tuning of Smith predictor effective for the control of AVAs. To improve the model accuracy of AVAs, the approximation model of pipe resonance is utilized. Moreover, to determine suitable time delay in the Smith predictor, our methods utilize the resonance frequency of the control system and the tracking error of the isolated table. Conventionally, the nominal value of the dead-time can be obtained by using step response of the control system. On the other hand, it is difficult to exactly estimate the dead-time of AVAs due to position sensor noise. Therefore, the time delay is precisely tuned by proposed methods instead of the step response approach in order to improve the performance of the Smith predictor. Experimental results show that when the error of the time delay in the predictor is zero, the resonance frequency and the time integral become minimized." @default.
• W2049552945 created "2016-06-24" @default.
• W2049552945 creator A5060000239 @default.
• W2049552945 creator A5066278291 @default.
• W2049552945 creator A5068960153 @default.
• W2049552945 date "2013-01-01" @default.
• W2049552945 modified "2023-09-27" @default.
• W2049552945 title "Tuning Methods of a Smith Predictor for Pneumatic Active Anti-Vibration Apparatuses" @default.
• W2049552945 cites W1973990181 @default.
• W2049552945 cites W1974984002 @default.
• W2049552945 cites W2008818530 @default.
• W2049552945 cites W2011360309 @default.
• W2049552945 cites W2046236417 @default.
• W2049552945 cites W2064365943 @default.
• W2049552945 cites W2077795049 @default.
• W2049552945 doi "https://doi.org/10.1299/jamdsm.7.666" @default.
• W2049552945 hasPublicationYear "2013" @default.
• W2049552945 type Work @default.
• W2049552945 sameAs 2049552945 @default.
• W2049552945 citedByCount "7" @default.
• W2049552945 countsByYear W20495529452014 @default.
• W2049552945 countsByYear W20495529452015 @default.
• W2049552945 countsByYear W20495529452019 @default.
• W2049552945 countsByYear W20495529452020 @default.
• W2049552945 countsByYear W20495529452022 @default.
• W2049552945 crossrefType "journal-article" @default.
• W2049552945 hasAuthorship W2049552945A5060000239 @default.
• W2049552945 hasAuthorship W2049552945A5066278291 @default.
• W2049552945 hasAuthorship W2049552945A5068960153 @default.
• W2049552945 hasBestOaLocation W20495529451 @default.
• W2049552945 hasConcept C10138342 @default.
• W2049552945 hasConcept C105795698 @default.
• W2049552945 hasConcept C111368507 @default.
• W2049552945 hasConcept C115961682 @default.
• W2049552945 hasConcept C121332964 @default.
• W2049552945 hasConcept C121684516 @default.
• W2049552945 hasConcept C127313418 @default.
• W2049552945 hasConcept C127413603 @default.
• W2049552945 hasConcept C133731056 @default.
• W2049552945 hasConcept C154945302 @default.
• W2049552945 hasConcept C15744967 @default.
• W2049552945 hasConcept C159484563 @default.
• W2049552945 hasConcept C162324750 @default.
• W2049552945 hasConcept C162853984 @default.
• W2049552945 hasConcept C183356978 @default.
• W2049552945 hasConcept C19012869 @default.
• W2049552945 hasConcept C19417346 @default.
• W2049552945 hasConcept C198082294 @default.
• W2049552945 hasConcept C198394728 @default.
• W2049552945 hasConcept C24890656 @default.
• W2049552945 hasConcept C2775924081 @default.
• W2049552945 hasConcept C2775936607 @default.
• W2049552945 hasConcept C33923547 @default.
• W2049552945 hasConcept C41008148 @default.
• W2049552945 hasConcept C47116090 @default.
• W2049552945 hasConcept C47446073 @default.
• W2049552945 hasConcept C536315585 @default.
• W2049552945 hasConcept C63840607 @default.
• W2049552945 hasConcept C99498987 @default.
• W2049552945 hasConceptScore W2049552945C10138342 @default.
• W2049552945 hasConceptScore W2049552945C105795698 @default.
• W2049552945 hasConceptScore W2049552945C111368507 @default.
• W2049552945 hasConceptScore W2049552945C115961682 @default.
• W2049552945 hasConceptScore W2049552945C121332964 @default.
• W2049552945 hasConceptScore W2049552945C121684516 @default.
• W2049552945 hasConceptScore W2049552945C127313418 @default.
• W2049552945 hasConceptScore W2049552945C127413603 @default.
• W2049552945 hasConceptScore W2049552945C133731056 @default.
• W2049552945 hasConceptScore W2049552945C154945302 @default.
• W2049552945 hasConceptScore W2049552945C15744967 @default.
• W2049552945 hasConceptScore W2049552945C159484563 @default.
• W2049552945 hasConceptScore W2049552945C162324750 @default.
• W2049552945 hasConceptScore W2049552945C162853984 @default.
• W2049552945 hasConceptScore W2049552945C183356978 @default.
• W2049552945 hasConceptScore W2049552945C19012869 @default.
• W2049552945 hasConceptScore W2049552945C19417346 @default.
• W2049552945 hasConceptScore W2049552945C198082294 @default.
• W2049552945 hasConceptScore W2049552945C198394728 @default.
• W2049552945 hasConceptScore W2049552945C24890656 @default.
• W2049552945 hasConceptScore W2049552945C2775924081 @default.
• W2049552945 hasConceptScore W2049552945C2775936607 @default.
• W2049552945 hasConceptScore W2049552945C33923547 @default.
• W2049552945 hasConceptScore W2049552945C41008148 @default.
• W2049552945 hasConceptScore W2049552945C47116090 @default.
• W2049552945 hasConceptScore W2049552945C47446073 @default.
• W2049552945 hasConceptScore W2049552945C536315585 @default.
• W2049552945 hasConceptScore W2049552945C63840607 @default.
• W2049552945 hasConceptScore W2049552945C99498987 @default.
• W2049552945 hasIssue "4" @default.
• W2049552945 hasLocation W20495529451 @default.
• W2049552945 hasOpenAccess W2049552945 @default.
• W2049552945 hasPrimaryLocation W20495529451 @default.
• W2049552945 hasRelatedWork W1954131364 @default.
• W2049552945 hasRelatedWork W2120166692 @default.
• W2049552945 hasRelatedWork W2135510724 @default.
• W2049552945 hasRelatedWork W2167472016 @default.
• W2049552945 hasRelatedWork W2357443825 @default.
• W2049552945 hasRelatedWork W2360735272 @default.

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