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- W2049563500 abstract "Submicron photolithographic processes present significant manufacturing challenges due to the relatively small process windows often found with these technologies. Small upstream variations in the pre-expose portion of the photomodule or subtle radial variations in the imaged layers reflectivity can result in final critical dimensions which are outside of the desired specification. One important parameter which has been found to significantly impact the final critical dimension is film reflectivity. This parameter is difficult to control and is a function of the optical characteristics of the layer being imaged, its thickness, and the resist thickness. In our process, improved poly silicon CD control was sought for a 0.8 jim process. Resist and poly thickness were investigated and optimal thicknesses determined. Poly CD control improved as a direct result of this optimization process.© (1990) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only." @default.
- W2049563500 created "2016-06-24" @default.
- W2049563500 creator A5001930231 @default.
- W2049563500 creator A5032847882 @default.
- W2049563500 creator A5034788018 @default.
- W2049563500 date "1990-06-01" @default.
- W2049563500 modified "2023-09-27" @default.
- W2049563500 title "<title>Analysis of film reflectivity and its impact on photolithographic processing</title>" @default.
- W2049563500 doi "https://doi.org/10.1117/12.20074" @default.
- W2049563500 hasPublicationYear "1990" @default.
- W2049563500 type Work @default.
- W2049563500 sameAs 2049563500 @default.
- W2049563500 citedByCount "1" @default.
- W2049563500 crossrefType "proceedings-article" @default.
- W2049563500 hasAuthorship W2049563500A5001930231 @default.
- W2049563500 hasAuthorship W2049563500A5032847882 @default.
- W2049563500 hasAuthorship W2049563500A5034788018 @default.
- W2049563500 hasConcept C105487726 @default.
- W2049563500 hasConcept C108597893 @default.
- W2049563500 hasConcept C111919701 @default.
- W2049563500 hasConcept C120665830 @default.
- W2049563500 hasConcept C121332964 @default.
- W2049563500 hasConcept C151857401 @default.
- W2049563500 hasConcept C155386361 @default.
- W2049563500 hasConcept C171250308 @default.
- W2049563500 hasConcept C192562407 @default.
- W2049563500 hasConcept C2779227376 @default.
- W2049563500 hasConcept C41008148 @default.
- W2049563500 hasConcept C49040817 @default.
- W2049563500 hasConcept C53524968 @default.
- W2049563500 hasConcept C544956773 @default.
- W2049563500 hasConcept C98045186 @default.
- W2049563500 hasConceptScore W2049563500C105487726 @default.
- W2049563500 hasConceptScore W2049563500C108597893 @default.
- W2049563500 hasConceptScore W2049563500C111919701 @default.
- W2049563500 hasConceptScore W2049563500C120665830 @default.
- W2049563500 hasConceptScore W2049563500C121332964 @default.
- W2049563500 hasConceptScore W2049563500C151857401 @default.
- W2049563500 hasConceptScore W2049563500C155386361 @default.
- W2049563500 hasConceptScore W2049563500C171250308 @default.
- W2049563500 hasConceptScore W2049563500C192562407 @default.
- W2049563500 hasConceptScore W2049563500C2779227376 @default.
- W2049563500 hasConceptScore W2049563500C41008148 @default.
- W2049563500 hasConceptScore W2049563500C49040817 @default.
- W2049563500 hasConceptScore W2049563500C53524968 @default.
- W2049563500 hasConceptScore W2049563500C544956773 @default.
- W2049563500 hasConceptScore W2049563500C98045186 @default.
- W2049563500 hasLocation W20495635001 @default.
- W2049563500 hasOpenAccess W2049563500 @default.
- W2049563500 hasPrimaryLocation W20495635001 @default.
- W2049563500 hasRelatedWork W1967453112 @default.
- W2049563500 hasRelatedWork W1980689379 @default.
- W2049563500 hasRelatedWork W1989778098 @default.
- W2049563500 hasRelatedWork W1990335418 @default.
- W2049563500 hasRelatedWork W1991375325 @default.
- W2049563500 hasRelatedWork W1994212431 @default.
- W2049563500 hasRelatedWork W1997354119 @default.
- W2049563500 hasRelatedWork W1998238989 @default.
- W2049563500 hasRelatedWork W2007466414 @default.
- W2049563500 hasRelatedWork W2008911561 @default.
- W2049563500 hasRelatedWork W2025953548 @default.
- W2049563500 hasRelatedWork W2036249767 @default.
- W2049563500 hasRelatedWork W2048128747 @default.
- W2049563500 hasRelatedWork W2050892570 @default.
- W2049563500 hasRelatedWork W2051494055 @default.
- W2049563500 hasRelatedWork W2083317447 @default.
- W2049563500 hasRelatedWork W2128622171 @default.
- W2049563500 hasRelatedWork W2476919329 @default.
- W2049563500 hasRelatedWork W2224506150 @default.
- W2049563500 hasRelatedWork W2861290669 @default.
- W2049563500 isParatext "false" @default.
- W2049563500 isRetracted "false" @default.
- W2049563500 magId "2049563500" @default.
- W2049563500 workType "article" @default.