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- W2049610311 abstract "A fully self-aligned low-temperature poly-silicon (LTPS) TFT process with symmetric LDD structure is developed. The gate insulator is deposited, then the insulator is etched during gate etching step with well-controlled LDD structure. With this insulator foot, the source/drain of NMOS or PMOS is self-aligned doped and the length of insulator foot controls the leakage current. In this paper, we discussed the effect of insulator foot in NMOS and PMOS, and we found the TFT characteristics of NMOS and PMOS are good enough for both pixel and driver applications." @default.
- W2049610311 created "2016-06-24" @default.
- W2049610311 creator A5004026597 @default.
- W2049610311 creator A5025476844 @default.
- W2049610311 creator A5063422891 @default.
- W2049610311 creator A5066858338 @default.
- W2049610311 date "2003-01-01" @default.
- W2049610311 modified "2023-09-30" @default.
- W2049610311 title "46.5: Fully Self-Aligned Low-Temperature Poly-Silicon TFT Process with Symmetric LDD Structure" @default.
- W2049610311 cites W2057841257 @default.
- W2049610311 cites W2104758042 @default.
- W2049610311 cites W2115506273 @default.
- W2049610311 cites W2120627111 @default.
- W2049610311 cites W2164484846 @default.
- W2049610311 doi "https://doi.org/10.1889/1.1832529" @default.
- W2049610311 hasPublicationYear "2003" @default.
- W2049610311 type Work @default.
- W2049610311 sameAs 2049610311 @default.
- W2049610311 citedByCount "2" @default.
- W2049610311 crossrefType "journal-article" @default.
- W2049610311 hasAuthorship W2049610311A5004026597 @default.
- W2049610311 hasAuthorship W2049610311A5025476844 @default.
- W2049610311 hasAuthorship W2049610311A5063422891 @default.
- W2049610311 hasAuthorship W2049610311A5066858338 @default.
- W2049610311 hasConcept C100460472 @default.
- W2049610311 hasConcept C119599485 @default.
- W2049610311 hasConcept C127413603 @default.
- W2049610311 hasConcept C159985019 @default.
- W2049610311 hasConcept C165801399 @default.
- W2049610311 hasConcept C172385210 @default.
- W2049610311 hasConcept C192562407 @default.
- W2049610311 hasConcept C197162436 @default.
- W2049610311 hasConcept C212702 @default.
- W2049610311 hasConcept C27050352 @default.
- W2049610311 hasConcept C2779227376 @default.
- W2049610311 hasConcept C49040817 @default.
- W2049610311 hasConcept C53143962 @default.
- W2049610311 hasConcept C544956773 @default.
- W2049610311 hasConcept C87359718 @default.
- W2049610311 hasConceptScore W2049610311C100460472 @default.
- W2049610311 hasConceptScore W2049610311C119599485 @default.
- W2049610311 hasConceptScore W2049610311C127413603 @default.
- W2049610311 hasConceptScore W2049610311C159985019 @default.
- W2049610311 hasConceptScore W2049610311C165801399 @default.
- W2049610311 hasConceptScore W2049610311C172385210 @default.
- W2049610311 hasConceptScore W2049610311C192562407 @default.
- W2049610311 hasConceptScore W2049610311C197162436 @default.
- W2049610311 hasConceptScore W2049610311C212702 @default.
- W2049610311 hasConceptScore W2049610311C27050352 @default.
- W2049610311 hasConceptScore W2049610311C2779227376 @default.
- W2049610311 hasConceptScore W2049610311C49040817 @default.
- W2049610311 hasConceptScore W2049610311C53143962 @default.
- W2049610311 hasConceptScore W2049610311C544956773 @default.
- W2049610311 hasConceptScore W2049610311C87359718 @default.
- W2049610311 hasLocation W20496103111 @default.
- W2049610311 hasOpenAccess W2049610311 @default.
- W2049610311 hasPrimaryLocation W20496103111 @default.
- W2049610311 hasRelatedWork W1481627311 @default.
- W2049610311 hasRelatedWork W2019763968 @default.
- W2049610311 hasRelatedWork W2037612358 @default.
- W2049610311 hasRelatedWork W2077281834 @default.
- W2049610311 hasRelatedWork W2089801767 @default.
- W2049610311 hasRelatedWork W2092729464 @default.
- W2049610311 hasRelatedWork W2136302613 @default.
- W2049610311 hasRelatedWork W2137075071 @default.
- W2049610311 hasRelatedWork W2142836934 @default.
- W2049610311 hasRelatedWork W2146414490 @default.
- W2049610311 hasRelatedWork W2147856648 @default.
- W2049610311 hasRelatedWork W2335713460 @default.
- W2049610311 hasRelatedWork W2361578251 @default.
- W2049610311 hasRelatedWork W2409570959 @default.
- W2049610311 hasRelatedWork W2533146337 @default.
- W2049610311 hasRelatedWork W3161750974 @default.
- W2049610311 hasRelatedWork W2187528388 @default.
- W2049610311 hasRelatedWork W2801178868 @default.
- W2049610311 hasRelatedWork W2836459505 @default.
- W2049610311 hasRelatedWork W2873187488 @default.
- W2049610311 isParatext "false" @default.
- W2049610311 isRetracted "false" @default.
- W2049610311 magId "2049610311" @default.
- W2049610311 workType "article" @default.