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- W2049663354 abstract "Abstract We have reported the wafer bonding of gold (Au)Au at 400 °C using the simple furnace and have investigated the structural properties of the Au-bonded layer. Scanning electron microscopy indicated that the bonding interface was clear and straight and the average interfacial grain size of Au-bonded layer increased by the wafer bonding. X-ray diffraction revealed that the lattice plane spacings of interfacial grains decreased by the wafer bonding and the bonded Au layer tended to show the (2 2 0) preferred grain orientation." @default.
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- W2049663354 date "2004-06-01" @default.
- W2049663354 modified "2023-09-26" @default.
- W2049663354 title "Structural investigations of gold-to-gold wafer bonding interfaces" @default.
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- W2049663354 doi "https://doi.org/10.1016/j.mseb.2004.03.004" @default.
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