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- W2049967662 abstract "Considering the crystallization in amorphous semiconducting material as a phase transition of first kind a model of a lateral spreading out crystallization process is developed, which takes into account the feed back of the released latent heat to the kinetics of nucleation and growth of crystallites. Deciding between solid and liquid phase crystallization a classification of explosive crystallization phenomena will be given. Model calculations are carried out for lateral moving explosive fronts of solid-phase epitaxy and solid-phase nucleation. From the dependence of the velocity of the front on the substrate temperature derived in the case of stationarity it becomes evident, that the explosive solid-phase epitaxy should be impossible in silicon and the explosive solid-phase nucleation can initiate explosive liquid-phase processes. Indem man die Kristallisation in amorphem Halbleitermaterial als einen Phasenübergang erster Art betrachtet, wird ein Modell eines sich lateral ausbreitenden Kristallisationsprozesses entwickelt, welches die Rückkopplung der freigesetzten latenten Wärme auf die Kinetik der Keimbildung und des Kristallitwachstums berücksichtigt. Indem man zwischen Fest- und Flüssigphasenkristallisation unterscheidet, wird eine Klassifikation der explosiven Kristallisationsphänomene möglich. Für sich lateral bewegende Explosivfronten der Festphasenepitaxie und der Festphasennukleation werden Modellrechnungen durchgeführt. Aus der unter der Bedingung der Stationarität abgeleiteten Abhängigkeit der Frontgeschwindigkeit von der Substrattemperatur wird deutlich, daß die explosive Festphasenepitaxie in Si unmöglich sein sollte und die explosive Festphasennukleation explosive Flüssigphasenprozesse zünden kann." @default.
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- W2049967662 date "1985-12-16" @default.
- W2049967662 modified "2023-09-27" @default.
- W2049967662 title "Phenomenological theory of explosive solid phase crystallization of amorphous silicon" @default.
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- W2049967662 doi "https://doi.org/10.1002/pssa.2210920211" @default.
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