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- W2049968368 abstract "Abstract Yttrium oxide (Y 2 O 3 ) thin films were grown onto Si(1 0 0) substrates using reactive magnetron sputter-deposition at temperatures ranging from room temperature (RT) to 500 °C. The effect of growth temperature ( T s ) on the growth behavior, microstructure and optical properties of Y 2 O 3 films was investigated. The structural studies employing reflection high-energy electron diffraction RHEED indicate that the films grown at room temperature (RT) are amorphous while the films grown at T s = 300–500 °C are nanocrystalline and crystallize in cubic structure. Grain-size ( L ) increases from ∼15 to 40 nm with increasing T s . Spectroscopic ellipsometry measurements indicate that the size-effects and ultra-microstructure were significant on the optical constants and their dispersion profiles of Y 2 O 3 films. A significant enhancement in the index of refraction ( n ) (from 2.03 to 2.25) is observed in well-defined Y 2 O 3 nanocrystalline films compared to that of amorphous Y 2 O 3 . The observed changes in the optical constants were explained on the basis of increased packing density and crystallinity of the films with increasing T s . The spectrophotometry analysis indicates the direct nature of the band gap ( E g ) in Y 2 O 3 films. E g values vary in the range of 5.91–6.15 eV for Y 2 O 3 films grown in the range of RT-500 °C, where the lower E g values for films grown at lower temperature is attributed to incomplete oxidation and formation of chemical defects. A direct, linear relationship between microstructure and optical parameters found for Y 2 O 3 films suggest that tuning optical properties for desired applications can be achieved by controlling the size and structure at the nanoscale dimensions." @default.
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- W2049968368 date "2012-03-01" @default.
- W2049968368 modified "2023-10-16" @default.
- W2049968368 title "Structure, morphology and optical properties of nanocrystalline yttrium oxide (Y2O3) thin films" @default.
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- W2049968368 doi "https://doi.org/10.1016/j.optmat.2011.11.027" @default.
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