Matches in SemOpenAlex for { <https://semopenalex.org/work/W2049969408> ?p ?o ?g. }
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- W2049969408 endingPage "31" @default.
- W2049969408 startingPage "29" @default.
- W2049969408 abstract "A preparation procedure of B1 cubic TaN films by RF reactive sputtering is reported for various N2 partial flow rates. The resultant films are evaluated by X-ray diffraction and the superconducting transition-temperature measurement. With increasing N2 flow rate above 5% in ArN2 mixture gas, cubic TaN patterns appear with a sharp (111) peak which indicates stacked (111) planes along the growth direction. N2 flow rate higher than 25% results in peak broadening of (111) of amorphous TaN. Three films (N2 = 5%, 10%, 15%) show higher transition temperature (5.9–7.0 K)." @default.
- W2049969408 created "2016-06-24" @default.
- W2049969408 creator A5010867955 @default.
- W2049969408 creator A5058046076 @default.
- W2049969408 creator A5067067081 @default.
- W2049969408 creator A5078229659 @default.
- W2049969408 creator A5084106726 @default.
- W2049969408 creator A5089625418 @default.
- W2049969408 date "1997-08-01" @default.
- W2049969408 modified "2023-09-29" @default.
- W2049969408 title "Superconductivity of reactivity sputtered TaN film for ULSI process" @default.
- W2049969408 cites W1983406786 @default.
- W2049969408 cites W2045384089 @default.
- W2049969408 cites W2053204255 @default.
- W2049969408 cites W2064774055 @default.
- W2049969408 doi "https://doi.org/10.1016/s0921-4526(97)00370-0" @default.
- W2049969408 hasPublicationYear "1997" @default.
- W2049969408 type Work @default.
- W2049969408 sameAs 2049969408 @default.
- W2049969408 citedByCount "27" @default.
- W2049969408 countsByYear W20499694082013 @default.
- W2049969408 countsByYear W20499694082014 @default.
- W2049969408 countsByYear W20499694082016 @default.
- W2049969408 countsByYear W20499694082017 @default.
- W2049969408 countsByYear W20499694082021 @default.
- W2049969408 countsByYear W20499694082022 @default.
- W2049969408 countsByYear W20499694082023 @default.
- W2049969408 crossrefType "journal-article" @default.
- W2049969408 hasAuthorship W2049969408A5010867955 @default.
- W2049969408 hasAuthorship W2049969408A5058046076 @default.
- W2049969408 hasAuthorship W2049969408A5067067081 @default.
- W2049969408 hasAuthorship W2049969408A5078229659 @default.
- W2049969408 hasAuthorship W2049969408A5084106726 @default.
- W2049969408 hasAuthorship W2049969408A5089625418 @default.
- W2049969408 hasConcept C113196181 @default.
- W2049969408 hasConcept C120665830 @default.
- W2049969408 hasConcept C121332964 @default.
- W2049969408 hasConcept C171250308 @default.
- W2049969408 hasConcept C172120300 @default.
- W2049969408 hasConcept C185592680 @default.
- W2049969408 hasConcept C19067145 @default.
- W2049969408 hasConcept C192562407 @default.
- W2049969408 hasConcept C207114421 @default.
- W2049969408 hasConcept C22423302 @default.
- W2049969408 hasConcept C26873012 @default.
- W2049969408 hasConcept C43617362 @default.
- W2049969408 hasConcept C47542005 @default.
- W2049969408 hasConcept C54101563 @default.
- W2049969408 hasConcept C56052488 @default.
- W2049969408 hasConcept C8010536 @default.
- W2049969408 hasConcept C97355855 @default.
- W2049969408 hasConceptScore W2049969408C113196181 @default.
- W2049969408 hasConceptScore W2049969408C120665830 @default.
- W2049969408 hasConceptScore W2049969408C121332964 @default.
- W2049969408 hasConceptScore W2049969408C171250308 @default.
- W2049969408 hasConceptScore W2049969408C172120300 @default.
- W2049969408 hasConceptScore W2049969408C185592680 @default.
- W2049969408 hasConceptScore W2049969408C19067145 @default.
- W2049969408 hasConceptScore W2049969408C192562407 @default.
- W2049969408 hasConceptScore W2049969408C207114421 @default.
- W2049969408 hasConceptScore W2049969408C22423302 @default.
- W2049969408 hasConceptScore W2049969408C26873012 @default.
- W2049969408 hasConceptScore W2049969408C43617362 @default.
- W2049969408 hasConceptScore W2049969408C47542005 @default.
- W2049969408 hasConceptScore W2049969408C54101563 @default.
- W2049969408 hasConceptScore W2049969408C56052488 @default.
- W2049969408 hasConceptScore W2049969408C8010536 @default.
- W2049969408 hasConceptScore W2049969408C97355855 @default.
- W2049969408 hasIssue "1-2" @default.
- W2049969408 hasLocation W20499694081 @default.
- W2049969408 hasOpenAccess W2049969408 @default.
- W2049969408 hasPrimaryLocation W20499694081 @default.
- W2049969408 hasRelatedWork W1995614330 @default.
- W2049969408 hasRelatedWork W2019416042 @default.
- W2049969408 hasRelatedWork W2051615398 @default.
- W2049969408 hasRelatedWork W2086781581 @default.
- W2049969408 hasRelatedWork W2147010001 @default.
- W2049969408 hasRelatedWork W2167466466 @default.
- W2049969408 hasRelatedWork W2384986301 @default.
- W2049969408 hasRelatedWork W2921344814 @default.
- W2049969408 hasRelatedWork W3104369229 @default.
- W2049969408 hasRelatedWork W3123228378 @default.
- W2049969408 hasVolume "239" @default.
- W2049969408 isParatext "false" @default.
- W2049969408 isRetracted "false" @default.
- W2049969408 magId "2049969408" @default.
- W2049969408 workType "article" @default.