FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2050237445> ?p ?o ?g. }

• W2050237445 endingPage "6843" @default.
• W2050237445 startingPage "6839" @default.
• W2050237445 abstract "The Si molecular beam reactive etching of thick thermally grown SiO2 and bulk SiO2 has been studied. In situ observations by Auger electron spectroscopy and reflection high energy electron diffraction reveal that Si films grow epitaxially on Si (100) substrates at 1000 °C after removal of 0.5 μm thermally grown SiO2 by a Si molecular beam. It is found that simultaneous deposition of polycrystalline Si films containing many oxygen atoms occurs on etched SiO2 at 900 °C. Surface morphology of the etched bulk SiO2 and the Si over layers caused by simultaneous deposition is observed by scanning electron microscopy." @default.
• W2050237445 created "2016-06-24" @default.
• W2050237445 creator A5009175947 @default.
• W2050237445 creator A5064500647 @default.
• W2050237445 creator A5084120886 @default.
• W2050237445 date "1982-10-01" @default.
• W2050237445 modified "2023-10-14" @default.
• W2050237445 title "Competing processes of Si molecular beam reactive etching and simultaneous deposition on film and bulk SiO2" @default.
• W2050237445 cites W1969749812 @default.
• W2050237445 cites W1987866211 @default.
• W2050237445 cites W1998835380 @default.
• W2050237445 cites W2008358317 @default.
• W2050237445 cites W2024869621 @default.
• W2050237445 cites W2034802644 @default.
• W2050237445 cites W2036604472 @default.
• W2050237445 doi "https://doi.org/10.1063/1.330074" @default.
• W2050237445 hasPublicationYear "1982" @default.
• W2050237445 type Work @default.
• W2050237445 sameAs 2050237445 @default.
• W2050237445 citedByCount "17" @default.
• W2050237445 countsByYear W20502374452013 @default.
• W2050237445 countsByYear W20502374452014 @default.
• W2050237445 countsByYear W20502374452015 @default.
• W2050237445 countsByYear W20502374452016 @default.
• W2050237445 countsByYear W20502374452020 @default.
• W2050237445 crossrefType "journal-article" @default.
• W2050237445 hasAuthorship W2050237445A5009175947 @default.
• W2050237445 hasAuthorship W2050237445A5064500647 @default.
• W2050237445 hasAuthorship W2050237445A5084120886 @default.
• W2050237445 hasConcept C100460472 @default.
• W2050237445 hasConcept C109486029 @default.
• W2050237445 hasConcept C110738630 @default.
• W2050237445 hasConcept C113196181 @default.
• W2050237445 hasConcept C120665830 @default.
• W2050237445 hasConcept C121332964 @default.
• W2050237445 hasConcept C130472188 @default.
• W2050237445 hasConcept C137637335 @default.
• W2050237445 hasConcept C151730666 @default.
• W2050237445 hasConcept C159985019 @default.
• W2050237445 hasConcept C171250308 @default.
• W2050237445 hasConcept C178790620 @default.
• W2050237445 hasConcept C185544564 @default.
• W2050237445 hasConcept C185592680 @default.
• W2050237445 hasConcept C19067145 @default.
• W2050237445 hasConcept C191897082 @default.
• W2050237445 hasConcept C192562407 @default.
• W2050237445 hasConcept C193016168 @default.
• W2050237445 hasConcept C200096950 @default.
• W2050237445 hasConcept C207114421 @default.
• W2050237445 hasConcept C25442681 @default.
• W2050237445 hasConcept C26771246 @default.
• W2050237445 hasConcept C2779227376 @default.
• W2050237445 hasConcept C2816523 @default.
• W2050237445 hasConcept C32909587 @default.
• W2050237445 hasConcept C3792809 @default.
• W2050237445 hasConcept C43617362 @default.
• W2050237445 hasConcept C49040817 @default.
• W2050237445 hasConcept C54419926 @default.
• W2050237445 hasConcept C544956773 @default.
• W2050237445 hasConcept C64297162 @default.
• W2050237445 hasConcept C77557913 @default.
• W2050237445 hasConcept C86803240 @default.
• W2050237445 hasConceptScore W2050237445C100460472 @default.
• W2050237445 hasConceptScore W2050237445C109486029 @default.
• W2050237445 hasConceptScore W2050237445C110738630 @default.
• W2050237445 hasConceptScore W2050237445C113196181 @default.
• W2050237445 hasConceptScore W2050237445C120665830 @default.
• W2050237445 hasConceptScore W2050237445C121332964 @default.
• W2050237445 hasConceptScore W2050237445C130472188 @default.
• W2050237445 hasConceptScore W2050237445C137637335 @default.
• W2050237445 hasConceptScore W2050237445C151730666 @default.
• W2050237445 hasConceptScore W2050237445C159985019 @default.
• W2050237445 hasConceptScore W2050237445C171250308 @default.
• W2050237445 hasConceptScore W2050237445C178790620 @default.
• W2050237445 hasConceptScore W2050237445C185544564 @default.
• W2050237445 hasConceptScore W2050237445C185592680 @default.
• W2050237445 hasConceptScore W2050237445C19067145 @default.
• W2050237445 hasConceptScore W2050237445C191897082 @default.
• W2050237445 hasConceptScore W2050237445C192562407 @default.
• W2050237445 hasConceptScore W2050237445C193016168 @default.
• W2050237445 hasConceptScore W2050237445C200096950 @default.
• W2050237445 hasConceptScore W2050237445C207114421 @default.
• W2050237445 hasConceptScore W2050237445C25442681 @default.
• W2050237445 hasConceptScore W2050237445C26771246 @default.
• W2050237445 hasConceptScore W2050237445C2779227376 @default.
• W2050237445 hasConceptScore W2050237445C2816523 @default.
• W2050237445 hasConceptScore W2050237445C32909587 @default.
• W2050237445 hasConceptScore W2050237445C3792809 @default.
• W2050237445 hasConceptScore W2050237445C43617362 @default.
• W2050237445 hasConceptScore W2050237445C49040817 @default.
• W2050237445 hasConceptScore W2050237445C54419926 @default.
• W2050237445 hasConceptScore W2050237445C544956773 @default.
• W2050237445 hasConceptScore W2050237445C64297162 @default.
• W2050237445 hasConceptScore W2050237445C77557913 @default.
• W2050237445 hasConceptScore W2050237445C86803240 @default.
• W2050237445 hasIssue "10" @default.
• W2050237445 hasLocation W20502374451 @default.
• W2050237445 hasOpenAccess W2050237445 @default.

• next