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- W2050242568 endingPage "6303" @default.
- W2050242568 startingPage "6303" @default.
- W2050242568 abstract "Microstructure shape of “crystal-originated particles” (COP's) on mirror-polished silicon wafers (a) as received, (b) cleaned with NH 4 OH/H 2 O 2 /H 2 O solution (SC-1), and (c) annealed at high temperature (∼1150° C) in O 2 /N 2 mixture or in H 2 , were observed using a scanning electron microscope (SEM), transmission electron microscope (TEM) and atomic force microscope (AFM). Elemental analysis of the COP's was also made using TEM-energy dispersion X-ray spectroscope (EDX). The COP was a pyramidal pit with {111} sidewalls, or a vertical cave having some facets of {111}. In a part of the COP, oxygen was detected by TEM-EDX. It was suggested that the microstructure shape of the COP's has been determined until the mirror polishing is finished. The size of the COP becomes larger and the slopes of the COP become gentler after an anneal in 3% O 2 /N 2 at 1150° C for 4 h and removal of the SiO 2 layer by HF solution. The depth of the COP becomes shallower, its size larger and its corners rounder by annealing in H 2 at 1100° C for 1 min. The COP's disappear by anealing in H 2 at 1150° C for 4 h." @default.
- W2050242568 created "2016-06-24" @default.
- W2050242568 creator A5027634720 @default.
- W2050242568 creator A5029069259 @default.
- W2050242568 creator A5054114626 @default.
- W2050242568 creator A5059499830 @default.
- W2050242568 creator A5070093486 @default.
- W2050242568 date "1995-12-01" @default.
- W2050242568 modified "2023-10-16" @default.
- W2050242568 title "Microstructure Observation of “Crystal-Originated Particles” on Silicon Wafers" @default.
- W2050242568 cites W1996921162 @default.
- W2050242568 cites W2029254610 @default.
- W2050242568 cites W2080433784 @default.
- W2050242568 cites W2094647600 @default.
- W2050242568 cites W2117401640 @default.
- W2050242568 doi "https://doi.org/10.1143/jjap.34.6303" @default.
- W2050242568 hasPublicationYear "1995" @default.
- W2050242568 type Work @default.
- W2050242568 sameAs 2050242568 @default.
- W2050242568 citedByCount "46" @default.
- W2050242568 countsByYear W20502425682015 @default.
- W2050242568 countsByYear W20502425682017 @default.
- W2050242568 crossrefType "journal-article" @default.
- W2050242568 hasAuthorship W2050242568A5027634720 @default.
- W2050242568 hasAuthorship W2050242568A5029069259 @default.
- W2050242568 hasAuthorship W2050242568A5054114626 @default.
- W2050242568 hasAuthorship W2050242568A5059499830 @default.
- W2050242568 hasAuthorship W2050242568A5070093486 @default.
- W2050242568 hasConcept C113196181 @default.
- W2050242568 hasConcept C138113353 @default.
- W2050242568 hasConcept C146088050 @default.
- W2050242568 hasConcept C159985019 @default.
- W2050242568 hasConcept C160671074 @default.
- W2050242568 hasConcept C171250308 @default.
- W2050242568 hasConcept C185592680 @default.
- W2050242568 hasConcept C191897082 @default.
- W2050242568 hasConcept C192562407 @default.
- W2050242568 hasConcept C199289684 @default.
- W2050242568 hasConcept C26771246 @default.
- W2050242568 hasConcept C2777855556 @default.
- W2050242568 hasConcept C43617362 @default.
- W2050242568 hasConcept C544956773 @default.
- W2050242568 hasConcept C8010536 @default.
- W2050242568 hasConcept C87976508 @default.
- W2050242568 hasConceptScore W2050242568C113196181 @default.
- W2050242568 hasConceptScore W2050242568C138113353 @default.
- W2050242568 hasConceptScore W2050242568C146088050 @default.
- W2050242568 hasConceptScore W2050242568C159985019 @default.
- W2050242568 hasConceptScore W2050242568C160671074 @default.
- W2050242568 hasConceptScore W2050242568C171250308 @default.
- W2050242568 hasConceptScore W2050242568C185592680 @default.
- W2050242568 hasConceptScore W2050242568C191897082 @default.
- W2050242568 hasConceptScore W2050242568C192562407 @default.
- W2050242568 hasConceptScore W2050242568C199289684 @default.
- W2050242568 hasConceptScore W2050242568C26771246 @default.
- W2050242568 hasConceptScore W2050242568C2777855556 @default.
- W2050242568 hasConceptScore W2050242568C43617362 @default.
- W2050242568 hasConceptScore W2050242568C544956773 @default.
- W2050242568 hasConceptScore W2050242568C8010536 @default.
- W2050242568 hasConceptScore W2050242568C87976508 @default.
- W2050242568 hasIssue "12R" @default.
- W2050242568 hasLocation W20502425681 @default.
- W2050242568 hasOpenAccess W2050242568 @default.
- W2050242568 hasPrimaryLocation W20502425681 @default.
- W2050242568 hasRelatedWork W2020349643 @default.
- W2050242568 hasRelatedWork W2054243438 @default.
- W2050242568 hasRelatedWork W2068113961 @default.
- W2050242568 hasRelatedWork W2326192748 @default.
- W2050242568 hasRelatedWork W2347531304 @default.
- W2050242568 hasRelatedWork W242636638 @default.
- W2050242568 hasRelatedWork W2513959326 @default.
- W2050242568 hasRelatedWork W2988947361 @default.
- W2050242568 hasRelatedWork W3082170855 @default.
- W2050242568 hasRelatedWork W4284958880 @default.
- W2050242568 hasVolume "34" @default.
- W2050242568 isParatext "false" @default.
- W2050242568 isRetracted "false" @default.
- W2050242568 magId "2050242568" @default.
- W2050242568 workType "article" @default.