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- W2050411782 abstract "Target X-ray source lithography and photo lithography mixed and match system was proposed foran effective lithography system. The key technology for the system is a projection moirealignment, whose marks are used for both photo and X-ray lithography. In order to realize thesysteimi, related technologies and apparatus are developing, which are photo and X-ray stepper, Xraysource of radiation cooled slotted Pd target, X-ray mask and X-ray mask inspection system." @default.
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- W2050411782 date "1990-05-01" @default.
- W2050411782 modified "2023-09-23" @default.
- W2050411782 title "Target x-ray source lithography and photolithography mixed and match system" @default.
- W2050411782 doi "https://doi.org/10.1117/12.20150" @default.
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