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• W2050456119 endingPage "812" @default.
• W2050456119 startingPage "806" @default.
• W2050456119 abstract "Cubic boron nitride (c-BN) films have been deposited by inductively coupled plasma chemical vapour deposition (CVD). With this technique films with a c-BN content of nearly 75% can be achieved. Investigations on the influence of the process parameters which are most important for depositing c-BN (ion flux, ion energy and substrate temperature) have been carried out. The results show good agreement with our theoretical sputter model. Furthermore, from these experiments it is possible to draw the conclusion that the physical vapour deposition and the ion-induced CVD of c-BN films rely on the same deposition mechanisms among which physical sputtering is most important." @default.
• W2050456119 created "2016-06-24" @default.
• W2050456119 creator A5010672968 @default.
• W2050456119 creator A5039820846 @default.
• W2050456119 creator A5061418538 @default.
• W2050456119 date "1995-10-01" @default.
• W2050456119 modified "2023-09-27" @default.
• W2050456119 title "Deposition of cubic boron nitride with an inductively coupled plasma" @default.
• W2050456119 cites W1974273858 @default.
• W2050456119 cites W1988914407 @default.
• W2050456119 cites W1994831920 @default.
• W2050456119 cites W1998070237 @default.
• W2050456119 cites W1999540411 @default.
• W2050456119 cites W2025107832 @default.
• W2050456119 cites W2033248441 @default.
• W2050456119 cites W2035005207 @default.
• W2050456119 cites W2042432373 @default.
• W2050456119 cites W2044777336 @default.
• W2050456119 cites W2055769781 @default.
• W2050456119 cites W2061369281 @default.
• W2050456119 cites W2078146947 @default.
• W2050456119 cites W2089519030 @default.
• W2050456119 cites W2091124392 @default.
• W2050456119 cites W2144527032 @default.
• W2050456119 doi "https://doi.org/10.1016/0257-8972(95)08279-4" @default.
• W2050456119 hasPublicationYear "1995" @default.
• W2050456119 type Work @default.
• W2050456119 sameAs 2050456119 @default.
• W2050456119 citedByCount "38" @default.
• W2050456119 countsByYear W20504561192012 @default.
• W2050456119 countsByYear W20504561192014 @default.
• W2050456119 countsByYear W20504561192019 @default.
• W2050456119 crossrefType "journal-article" @default.
• W2050456119 hasAuthorship W2050456119A5010672968 @default.
• W2050456119 hasAuthorship W2050456119A5039820846 @default.
• W2050456119 hasAuthorship W2050456119A5061418538 @default.
• W2050456119 hasConcept C107872376 @default.
• W2050456119 hasConcept C111368507 @default.
• W2050456119 hasConcept C113196181 @default.
• W2050456119 hasConcept C118442862 @default.
• W2050456119 hasConcept C121332964 @default.
• W2050456119 hasConcept C127313418 @default.
• W2050456119 hasConcept C145148216 @default.
• W2050456119 hasConcept C151730666 @default.
• W2050456119 hasConcept C171250308 @default.
• W2050456119 hasConcept C178790620 @default.
• W2050456119 hasConcept C185592680 @default.
• W2050456119 hasConcept C19067145 @default.
• W2050456119 hasConcept C192562407 @default.
• W2050456119 hasConcept C194760766 @default.
• W2050456119 hasConcept C22423302 @default.
• W2050456119 hasConcept C2777289219 @default.
• W2050456119 hasConcept C2779227376 @default.
• W2050456119 hasConcept C2780243435 @default.
• W2050456119 hasConcept C2816523 @default.
• W2050456119 hasConcept C501308230 @default.
• W2050456119 hasConcept C51576277 @default.
• W2050456119 hasConcept C57410435 @default.
• W2050456119 hasConcept C61427134 @default.
• W2050456119 hasConcept C62520636 @default.
• W2050456119 hasConcept C64297162 @default.
• W2050456119 hasConcept C82706917 @default.
• W2050456119 hasConcept C86803240 @default.
• W2050456119 hasConcept C95974651 @default.
• W2050456119 hasConceptScore W2050456119C107872376 @default.
• W2050456119 hasConceptScore W2050456119C111368507 @default.
• W2050456119 hasConceptScore W2050456119C113196181 @default.
• W2050456119 hasConceptScore W2050456119C118442862 @default.
• W2050456119 hasConceptScore W2050456119C121332964 @default.
• W2050456119 hasConceptScore W2050456119C127313418 @default.
• W2050456119 hasConceptScore W2050456119C145148216 @default.
• W2050456119 hasConceptScore W2050456119C151730666 @default.
• W2050456119 hasConceptScore W2050456119C171250308 @default.
• W2050456119 hasConceptScore W2050456119C178790620 @default.
• W2050456119 hasConceptScore W2050456119C185592680 @default.
• W2050456119 hasConceptScore W2050456119C19067145 @default.
• W2050456119 hasConceptScore W2050456119C192562407 @default.
• W2050456119 hasConceptScore W2050456119C194760766 @default.
• W2050456119 hasConceptScore W2050456119C22423302 @default.
• W2050456119 hasConceptScore W2050456119C2777289219 @default.
• W2050456119 hasConceptScore W2050456119C2779227376 @default.
• W2050456119 hasConceptScore W2050456119C2780243435 @default.
• W2050456119 hasConceptScore W2050456119C2816523 @default.
• W2050456119 hasConceptScore W2050456119C501308230 @default.
• W2050456119 hasConceptScore W2050456119C51576277 @default.
• W2050456119 hasConceptScore W2050456119C57410435 @default.
• W2050456119 hasConceptScore W2050456119C61427134 @default.
• W2050456119 hasConceptScore W2050456119C62520636 @default.
• W2050456119 hasConceptScore W2050456119C64297162 @default.
• W2050456119 hasConceptScore W2050456119C82706917 @default.
• W2050456119 hasConceptScore W2050456119C86803240 @default.
• W2050456119 hasConceptScore W2050456119C95974651 @default.
• W2050456119 hasLocation W20504561191 @default.
• W2050456119 hasOpenAccess W2050456119 @default.
• W2050456119 hasPrimaryLocation W20504561191 @default.
• W2050456119 hasRelatedWork W1995810423 @default.
• W2050456119 hasRelatedWork W2015401539 @default.
• W2050456119 hasRelatedWork W2030970608 @default.

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