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• W2050456844 abstract "TiO2 films were deposited by using mid-frequency twin magnetron reactive sputtering technique at ambient temperature on quartz and Si wafer. The films were annealed after deposition. The phase composition and surface morphology of the TiO2 films were characterized by X-ray diffraction, Raman spectroscopy, and scanning electron microscopy, while the optical properties and contact angle were measured using a UV-Vis spectrophotometer and a contact angle meter. It is indicated that anatase phase dominates below 900°C and a mixture of rutile and anatase exists in the film annealed at 1000°C. Furthermore, the hydrophilic property depends on phase composition and morphological change in TiO2 films." @default.
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• W2050456844 date "2007-05-01" @default.
• W2050456844 modified "2023-10-13" @default.
• W2050456844 title "Characterization and Wettability of TiO₂ Films Deposited by Mid-Frequency Magnetron Reactive Sputtering" @default.
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• W2050456844 doi "https://doi.org/10.4028/www.scientific.net/msf.544-545.27" @default.
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