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• W2050479955 abstract "The thickness of the chemisorbed oxide layer on a tantalum target surface was determined from sputter cleaning experiments. These measurements show a clear logarithmic growth behaviour as a function of the oxygen exposure. By extrapolating this result towards other sputter conditions, the target cleanness during magnetron sputter deposition can be estimated." @default.
• W2050479955 created "2016-06-24" @default.
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• W2050479955 date "1968-01-01" @default.
• W2050479955 modified "2023-10-16" @default.
• W2050479955 title "Orientation-dependent sticking coefficient in the germanium-oxygen system" @default.
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• W2050479955 doi "https://doi.org/10.1016/0039-6028(68)90183-0" @default.
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