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- W2050493728 abstract "Optical emission spectroscopy (OES) and exhaust gas mass spectrometry were used to study the gas phase during diamond growth in microwave plasma-assisted chemical vapor deposition (MPACVD). Mixtures with CF4 addition in H2/Ar and H2/Ar/CH4 have been studied. The relative emission intensity of atomic hydrogen line Hα has been measured by actinometry. This work presents a systematic study that has been performed with regard to the dependence of the relative intensity of the Hα line (656.3 nm) with CF4 addition. CF4 concentrations in the range of 0–5% have been studied. We also investigated the influence of oxygen addition on the relative intensity of the Hα line for fixed mixtures with H2/Ar/CH4 and H2/Ar/CF4. Our results have shown that CF4 and O2 addition increases considerably the atomic hydrogen concentration. These results suggest that the CF4 and O2 addition can promote diamond growth using systems with lower activation power." @default.
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- W2050493728 date "1997-03-01" @default.
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- W2050493728 title "H actinometry with CF4 addition in microwave plasma-assisted chemical vapor deposition of diamond" @default.
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- W2050493728 doi "https://doi.org/10.1016/s0925-9635(96)00637-1" @default.
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