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• W2050531566 endingPage "445302" @default.
• W2050531566 startingPage "445302" @default.
• W2050531566 abstract "A series of SiO 2 films with thickness range 1–600 nm have been deposited on crystal silicon (c-Si) substrates by electron beam evaporation (EBE) method. Variable-angle spectroscopic ellipsometry (VASE) in combination with a two-film model (ambient-oxide-interlayer substrate) was used to determine the optical constants and thicknesses of the investigated films. The refractive indices of SiO 2 films thicker than 60 nm are close to those of bulk SiO 2 . For the thin films deposited at the rate of ∼1.0 nm s −1 , the refractive indices increase with decreasing thickness from ∼60 to ∼10 nm and then drop sharply with decreasing thickness below ∼10 nm. However, for thin films deposited at the rates of ∼0.4 and ∼0.2 nm s −1 , the refractive indices monotonically increase with decreasing thickness below 60 nm. The optical constants of the ultrathin film depend on the morphology of the film, the stress exerted on the film, as well as the stoichiometry of the oxide film." @default.
• W2050531566 created "2016-06-24" @default.
• W2050531566 creator A5004562055 @default.
• W2050531566 creator A5011570965 @default.
• W2050531566 creator A5020050167 @default.
• W2050531566 creator A5020720471 @default.
• W2050531566 creator A5025025019 @default.
• W2050531566 creator A5034090800 @default.
• W2050531566 creator A5042284357 @default.
• W2050531566 date "2010-10-21" @default.
• W2050531566 modified "2023-10-18" @default.
• W2050531566 title "Evolution of optical constants of silicon dioxide on silicon from ultrathin films to thick films" @default.
• W2050531566 cites W1966261440 @default.
• W2050531566 cites W1968868129 @default.
• W2050531566 cites W1985261292 @default.
• W2050531566 cites W1985493240 @default.
• W2050531566 cites W1988302115 @default.
• W2050531566 cites W1989904603 @default.
• W2050531566 cites W1995536492 @default.
• W2050531566 cites W1998991681 @default.
• W2050531566 cites W1999801030 @default.
• W2050531566 cites W2023435527 @default.
• W2050531566 cites W2036942984 @default.
• W2050531566 cites W2041334840 @default.
• W2050531566 cites W2047179169 @default.
• W2050531566 cites W2068000622 @default.
• W2050531566 cites W2068910729 @default.
• W2050531566 cites W2071713139 @default.
• W2050531566 cites W2081310489 @default.
• W2050531566 cites W2087189558 @default.
• W2050531566 cites W2124737249 @default.
• W2050531566 cites W2134530077 @default.
• W2050531566 cites W2146118224 @default.
• W2050531566 cites W2167249389 @default.
• W2050531566 cites W4245272488 @default.
• W2050531566 doi "https://doi.org/10.1088/0022-3727/43/44/445302" @default.
• W2050531566 hasPublicationYear "2010" @default.
• W2050531566 type Work @default.
• W2050531566 sameAs 2050531566 @default.
• W2050531566 citedByCount "20" @default.
• W2050531566 countsByYear W20505315662012 @default.
• W2050531566 countsByYear W20505315662013 @default.
• W2050531566 countsByYear W20505315662014 @default.
• W2050531566 countsByYear W20505315662015 @default.
• W2050531566 countsByYear W20505315662016 @default.
• W2050531566 countsByYear W20505315662017 @default.
• W2050531566 countsByYear W20505315662018 @default.
• W2050531566 countsByYear W20505315662019 @default.
• W2050531566 countsByYear W20505315662020 @default.
• W2050531566 countsByYear W20505315662021 @default.
• W2050531566 countsByYear W20505315662022 @default.
• W2050531566 crossrefType "journal-article" @default.
• W2050531566 hasAuthorship W2050531566A5004562055 @default.
• W2050531566 hasAuthorship W2050531566A5011570965 @default.
• W2050531566 hasAuthorship W2050531566A5020050167 @default.
• W2050531566 hasAuthorship W2050531566A5020720471 @default.
• W2050531566 hasAuthorship W2050531566A5025025019 @default.
• W2050531566 hasAuthorship W2050531566A5034090800 @default.
• W2050531566 hasAuthorship W2050531566A5042284357 @default.
• W2050531566 hasConcept C111368507 @default.
• W2050531566 hasConcept C113196181 @default.
• W2050531566 hasConcept C120665830 @default.
• W2050531566 hasConcept C121332964 @default.
• W2050531566 hasConcept C127313418 @default.
• W2050531566 hasConcept C159985019 @default.
• W2050531566 hasConcept C171250308 @default.
• W2050531566 hasConcept C18293161 @default.
• W2050531566 hasConcept C185592680 @default.
• W2050531566 hasConcept C19067145 @default.
• W2050531566 hasConcept C191897082 @default.
• W2050531566 hasConcept C192562407 @default.
• W2050531566 hasConcept C2777289219 @default.
• W2050531566 hasConcept C2777431650 @default.
• W2050531566 hasConcept C2779089622 @default.
• W2050531566 hasConcept C2779105228 @default.
• W2050531566 hasConcept C2779851234 @default.
• W2050531566 hasConcept C42067758 @default.
• W2050531566 hasConcept C43617362 @default.
• W2050531566 hasConcept C49040817 @default.
• W2050531566 hasConcept C544956773 @default.
• W2050531566 hasConcept C61441594 @default.
• W2050531566 hasConcept C7770020 @default.
• W2050531566 hasConcept C97355855 @default.
• W2050531566 hasConceptScore W2050531566C111368507 @default.
• W2050531566 hasConceptScore W2050531566C113196181 @default.
• W2050531566 hasConceptScore W2050531566C120665830 @default.
• W2050531566 hasConceptScore W2050531566C121332964 @default.
• W2050531566 hasConceptScore W2050531566C127313418 @default.
• W2050531566 hasConceptScore W2050531566C159985019 @default.
• W2050531566 hasConceptScore W2050531566C171250308 @default.
• W2050531566 hasConceptScore W2050531566C18293161 @default.
• W2050531566 hasConceptScore W2050531566C185592680 @default.
• W2050531566 hasConceptScore W2050531566C19067145 @default.
• W2050531566 hasConceptScore W2050531566C191897082 @default.
• W2050531566 hasConceptScore W2050531566C192562407 @default.
• W2050531566 hasConceptScore W2050531566C2777289219 @default.
• W2050531566 hasConceptScore W2050531566C2777431650 @default.
• W2050531566 hasConceptScore W2050531566C2779089622 @default.

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