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- W2050552022 endingPage "153" @default.
- W2050552022 startingPage "145" @default.
- W2050552022 abstract "The sputtering of SiO2/Si interfaces with gallium ions was studied both experimentally by using secondary neutral mass spectrometry (SNMS) and by computer simulations by means of a dynamic Monte Carlo code. Oscillations of the gallium signal (from implanted primary ions) at the interface between the SiO2 and Si layers were observed. By means of computer simulations, it was shown that cascade effects alone cannot explain the experimental depth profiles. A model that includes additional defect transport phenomena such as bombardment-induced segregation is proposed and incorporated in an existing dynamic Monte Carlo computer code. The simulations with the new code give rise to profiles that are comparable with the experimental ones, confirming the correctness of the chosen approach." @default.
- W2050552022 created "2016-06-24" @default.
- W2050552022 creator A5028242060 @default.
- W2050552022 creator A5041533780 @default.
- W2050552022 creator A5049869380 @default.
- W2050552022 creator A5076910294 @default.
- W2050552022 date "2002-02-01" @default.
- W2050552022 modified "2023-10-18" @default.
- W2050552022 title "Segregation of gallium at SiO2/Si interfaces during sputtering with Ga+ ions: experimental and computer simulation study" @default.
- W2050552022 cites W1536811097 @default.
- W2050552022 cites W1976342244 @default.
- W2050552022 cites W1980633503 @default.
- W2050552022 cites W1999600357 @default.
- W2050552022 cites W2011912675 @default.
- W2050552022 cites W2070626265 @default.
- W2050552022 cites W2074384531 @default.
- W2050552022 cites W2084686405 @default.
- W2050552022 cites W2085962169 @default.
- W2050552022 cites W2086609256 @default.
- W2050552022 cites W2120385949 @default.
- W2050552022 cites W2154797010 @default.
- W2050552022 cites W4253056353 @default.
- W2050552022 cites W72147174 @default.
- W2050552022 doi "https://doi.org/10.1016/s0169-4332(01)00812-1" @default.
- W2050552022 hasPublicationYear "2002" @default.
- W2050552022 type Work @default.
- W2050552022 sameAs 2050552022 @default.
- W2050552022 citedByCount "7" @default.
- W2050552022 crossrefType "journal-article" @default.
- W2050552022 hasAuthorship W2050552022A5028242060 @default.
- W2050552022 hasAuthorship W2050552022A5041533780 @default.
- W2050552022 hasAuthorship W2050552022A5049869380 @default.
- W2050552022 hasAuthorship W2050552022A5076910294 @default.
- W2050552022 hasConcept C105795698 @default.
- W2050552022 hasConcept C121332964 @default.
- W2050552022 hasConcept C145148216 @default.
- W2050552022 hasConcept C171250308 @default.
- W2050552022 hasConcept C178790620 @default.
- W2050552022 hasConcept C184779094 @default.
- W2050552022 hasConcept C185592680 @default.
- W2050552022 hasConcept C19067145 @default.
- W2050552022 hasConcept C191897082 @default.
- W2050552022 hasConcept C192562407 @default.
- W2050552022 hasConcept C19499675 @default.
- W2050552022 hasConcept C22423302 @default.
- W2050552022 hasConcept C30475298 @default.
- W2050552022 hasConcept C33923547 @default.
- W2050552022 hasConcept C34146451 @default.
- W2050552022 hasConcept C43617362 @default.
- W2050552022 hasConcept C550372918 @default.
- W2050552022 hasConceptScore W2050552022C105795698 @default.
- W2050552022 hasConceptScore W2050552022C121332964 @default.
- W2050552022 hasConceptScore W2050552022C145148216 @default.
- W2050552022 hasConceptScore W2050552022C171250308 @default.
- W2050552022 hasConceptScore W2050552022C178790620 @default.
- W2050552022 hasConceptScore W2050552022C184779094 @default.
- W2050552022 hasConceptScore W2050552022C185592680 @default.
- W2050552022 hasConceptScore W2050552022C19067145 @default.
- W2050552022 hasConceptScore W2050552022C191897082 @default.
- W2050552022 hasConceptScore W2050552022C192562407 @default.
- W2050552022 hasConceptScore W2050552022C19499675 @default.
- W2050552022 hasConceptScore W2050552022C22423302 @default.
- W2050552022 hasConceptScore W2050552022C30475298 @default.
- W2050552022 hasConceptScore W2050552022C33923547 @default.
- W2050552022 hasConceptScore W2050552022C34146451 @default.
- W2050552022 hasConceptScore W2050552022C43617362 @default.
- W2050552022 hasConceptScore W2050552022C550372918 @default.
- W2050552022 hasIssue "1-2" @default.
- W2050552022 hasLocation W20505520221 @default.
- W2050552022 hasOpenAccess W2050552022 @default.
- W2050552022 hasPrimaryLocation W20505520221 @default.
- W2050552022 hasRelatedWork W163274878 @default.
- W2050552022 hasRelatedWork W1653219748 @default.
- W2050552022 hasRelatedWork W2021904537 @default.
- W2050552022 hasRelatedWork W2046953376 @default.
- W2050552022 hasRelatedWork W2066325085 @default.
- W2050552022 hasRelatedWork W2073706187 @default.
- W2050552022 hasRelatedWork W2083742102 @default.
- W2050552022 hasRelatedWork W2090474418 @default.
- W2050552022 hasRelatedWork W2898589928 @default.
- W2050552022 hasRelatedWork W3030603465 @default.
- W2050552022 hasVolume "187" @default.
- W2050552022 isParatext "false" @default.
- W2050552022 isRetracted "false" @default.
- W2050552022 magId "2050552022" @default.
- W2050552022 workType "article" @default.