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- W2050573080 abstract "A parameter-fitting technique has been developed to draw depth information by particle-induced x-ray emission analysis with 0.5–3.0-MeV He+ beams. In principle, it is possible to determine a depth profile of a target element of interest whose distribution is defined by n parameters (aj), if the x-ray yields are measured for different n incident energies Ei(i=1,2,...,n). In this case, one can calculate the x-ray yield Y(Ei) and get such combinations (aj) that give the x-ray yield coinciding with the measured one. Thus, one obtains n coupled equations, Y(Ei)=Fi(aj), which can be solved graphically as the crossing point in the n-dimension space of (aj). This technique is applied to analysis of the target structures which can be defined by one or two parameters such as multielemental and multilayered structures and interdiffusion and range profiles." @default.
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- W2050573080 date "1987-11-01" @default.
- W2050573080 modified "2023-10-16" @default.
- W2050573080 title "Depth profiling by particle-induced x-ray emission analysis using a parameter-fitting technique" @default.
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- W2050573080 doi "https://doi.org/10.1063/1.339213" @default.
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