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- W2050573988 abstract "In the last years the application of gray-scale masks (GSM) for diffractive optics manufacturing attracts attention because of cost-effective possibility to produce a lot of diffractive elements on hard and heat-resistant thermally stable substrates. Direct laser writing of GSMs and fabrication of diffractive optical elements are effectively realized with application of LDW-glass (material for Laser Direct Write from CANYON MATERIALS, Inc). An important advantage of this material is the real-time change of transmittance in a single-step process without liquid development. It is shown that optimal transmittance range in which track width is not more than 1 micrometers is from 5-10% (transmittance of unexposed area) to 60-65% for LDW-glass type I having thinner colored layer. Power modulation and surroundings dependent peculiarities of direct laser writing on LDW-glass are discussed. Results of fabrication of diffractive optical elements using LDW-glass masks are presented. Among several types of LDW glasses studied the advantages of new GS-11 glass are elaborated. Application of GS-11 glass for GSMs allowed to fabricate blazed diffractive structures with backward slope width of 0.8 micrometers ." @default.
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- W2050573988 date "2001-11-09" @default.
- W2050573988 modified "2023-09-26" @default.
- W2050573988 title "<title>Fabrication of gray-scale masks and diffractive optical elements with LDW glass</title>" @default.
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- W2050573988 doi "https://doi.org/10.1117/12.448026" @default.
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