Matches in SemOpenAlex for { <https://semopenalex.org/work/W2050576476> ?p ?o ?g. }
Showing items 1 to 74 of
74
with 100 items per page.
- W2050576476 endingPage "1829" @default.
- W2050576476 startingPage "1824" @default.
- W2050576476 abstract "The selective oxidation of silicon was investigated using a high pressure oxidation apparatus at a steam pressure of 6.6 kg/cm2 (6.4 atm) and at temperatures between 800° and 1100°C. The conversion characteristics of the silicon nitride film into silicon dioxide film in high pressure steam was analyzed on the basis of the well‐known linear‐parabolic relationship. The activation energy for the parabolic rate constant was found to be about 3.15 eV, which was about 5 times larger than that (0.7 eV) for silicon. On the other hand, the activation energy for the linear rate constant was about 1.25 eV which was a little smaller than that (2.03 eV) for silicon. The conventional silicon nitride film was found to be able to mask the selective oxidation even in the high pressure steam. The lateral oxidation of the silicon substrate beneath the masking nitride film occurred rapidly with decreasing oxidation temperature at the fixed pressure. The suppression of the lateral oxidation can be achieved by increasing the thickness of the masking nitride film and also by decreasing that of the oxide pad. This high pressure oxidation process was compatible with the conventional atmospheric process." @default.
- W2050576476 created "2016-06-24" @default.
- W2050576476 creator A5038121160 @default.
- W2050576476 creator A5041442497 @default.
- W2050576476 creator A5071427822 @default.
- W2050576476 date "1978-11-01" @default.
- W2050576476 modified "2023-09-27" @default.
- W2050576476 title "Selective Oxidation of Silicon in High Pressure Steam" @default.
- W2050576476 doi "https://doi.org/10.1149/1.2131304" @default.
- W2050576476 hasPublicationYear "1978" @default.
- W2050576476 type Work @default.
- W2050576476 sameAs 2050576476 @default.
- W2050576476 citedByCount "10" @default.
- W2050576476 crossrefType "journal-article" @default.
- W2050576476 hasAuthorship W2050576476A5038121160 @default.
- W2050576476 hasAuthorship W2050576476A5041442497 @default.
- W2050576476 hasAuthorship W2050576476A5071427822 @default.
- W2050576476 hasConcept C111368507 @default.
- W2050576476 hasConcept C113196181 @default.
- W2050576476 hasConcept C127313418 @default.
- W2050576476 hasConcept C159985019 @default.
- W2050576476 hasConcept C178790620 @default.
- W2050576476 hasConcept C185592680 @default.
- W2050576476 hasConcept C191897082 @default.
- W2050576476 hasConcept C192562407 @default.
- W2050576476 hasConcept C194760766 @default.
- W2050576476 hasConcept C195114451 @default.
- W2050576476 hasConcept C200239111 @default.
- W2050576476 hasConcept C2777289219 @default.
- W2050576476 hasConcept C2777431650 @default.
- W2050576476 hasConcept C2779089622 @default.
- W2050576476 hasConcept C2779227376 @default.
- W2050576476 hasConcept C2779851234 @default.
- W2050576476 hasConcept C49040817 @default.
- W2050576476 hasConcept C544956773 @default.
- W2050576476 hasConceptScore W2050576476C111368507 @default.
- W2050576476 hasConceptScore W2050576476C113196181 @default.
- W2050576476 hasConceptScore W2050576476C127313418 @default.
- W2050576476 hasConceptScore W2050576476C159985019 @default.
- W2050576476 hasConceptScore W2050576476C178790620 @default.
- W2050576476 hasConceptScore W2050576476C185592680 @default.
- W2050576476 hasConceptScore W2050576476C191897082 @default.
- W2050576476 hasConceptScore W2050576476C192562407 @default.
- W2050576476 hasConceptScore W2050576476C194760766 @default.
- W2050576476 hasConceptScore W2050576476C195114451 @default.
- W2050576476 hasConceptScore W2050576476C200239111 @default.
- W2050576476 hasConceptScore W2050576476C2777289219 @default.
- W2050576476 hasConceptScore W2050576476C2777431650 @default.
- W2050576476 hasConceptScore W2050576476C2779089622 @default.
- W2050576476 hasConceptScore W2050576476C2779227376 @default.
- W2050576476 hasConceptScore W2050576476C2779851234 @default.
- W2050576476 hasConceptScore W2050576476C49040817 @default.
- W2050576476 hasConceptScore W2050576476C544956773 @default.
- W2050576476 hasIssue "11" @default.
- W2050576476 hasLocation W20505764761 @default.
- W2050576476 hasOpenAccess W2050576476 @default.
- W2050576476 hasPrimaryLocation W20505764761 @default.
- W2050576476 hasRelatedWork W146845350 @default.
- W2050576476 hasRelatedWork W1976639700 @default.
- W2050576476 hasRelatedWork W2046836154 @default.
- W2050576476 hasRelatedWork W2090482347 @default.
- W2050576476 hasRelatedWork W2110115418 @default.
- W2050576476 hasRelatedWork W2145682277 @default.
- W2050576476 hasRelatedWork W2149618594 @default.
- W2050576476 hasRelatedWork W2150633460 @default.
- W2050576476 hasRelatedWork W2330103845 @default.
- W2050576476 hasRelatedWork W2094021022 @default.
- W2050576476 hasVolume "125" @default.
- W2050576476 isParatext "false" @default.
- W2050576476 isRetracted "false" @default.
- W2050576476 magId "2050576476" @default.
- W2050576476 workType "article" @default.