FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2050652072> ?p ?o ?g. }

• W2050652072 endingPage "L78" @default.
• W2050652072 startingPage "L75" @default.
• W2050652072 abstract "We show that the liquid crystal triphenylene derivative 2,3,6,7,10,11-hexapentyl-oxytriphenylene acts as a high-resolution electron beam resist. Using pentanol as a developer, positive behaviour was observed for electron doses greater than ~300µC cm-2 at 20 keV. At higher doses (>2.5 mC cm-2), the resist rapidly assumes negative tone behaviour. With the developer monochlorobenzene, only negative behaviour was observed, with a sensitivity of ~2.5 mC cm-2 at 20 keV. The resist allows relatively facile definition of 14 nm patterns (negative tone) with a 30 keV electron beam and without the need for any complex pre-irradiation preparation or post-irradiation processing of the resist." @default.
• W2050652072 created "2016-06-24" @default.
• W2050652072 creator A5002737824 @default.
• W2050652072 creator A5025007469 @default.
• W2050652072 creator A5037976740 @default.
• W2050652072 creator A5059404790 @default.
• W2050652072 creator A5064176073 @default.
• W2050652072 creator A5072913420 @default.
• W2050652072 creator A5080487700 @default.
• W2050652072 date "1999-08-12" @default.
• W2050652072 modified "2023-10-14" @default.
• W2050652072 title "10 nm scale electron beam lithography using a triphenylene derivative as a negative/positive tone resist" @default.
• W2050652072 cites W1990909305 @default.
• W2050652072 cites W1993941659 @default.
• W2050652072 cites W1997096873 @default.
• W2050652072 cites W2011918559 @default.
• W2050652072 cites W2012157361 @default.
• W2050652072 cites W2012854644 @default.
• W2050652072 cites W2027041444 @default.
• W2050652072 cites W2035566134 @default.
• W2050652072 cites W2043349730 @default.
• W2050652072 cites W2051581750 @default.
• W2050652072 cites W2054082183 @default.
• W2050652072 cites W2063902790 @default.
• W2050652072 cites W2065845928 @default.
• W2050652072 cites W2067172600 @default.
• W2050652072 cites W2084024481 @default.
• W2050652072 cites W2093200558 @default.
• W2050652072 doi "https://doi.org/10.1088/0022-3727/32/16/102" @default.
• W2050652072 hasPublicationYear "1999" @default.
• W2050652072 type Work @default.
• W2050652072 sameAs 2050652072 @default.
• W2050652072 citedByCount "42" @default.
• W2050652072 countsByYear W20506520722013 @default.
• W2050652072 countsByYear W20506520722016 @default.
• W2050652072 countsByYear W20506520722018 @default.
• W2050652072 countsByYear W20506520722019 @default.
• W2050652072 countsByYear W20506520722022 @default.
• W2050652072 crossrefType "journal-article" @default.
• W2050652072 hasAuthorship W2050652072A5002737824 @default.
• W2050652072 hasAuthorship W2050652072A5025007469 @default.
• W2050652072 hasAuthorship W2050652072A5037976740 @default.
• W2050652072 hasAuthorship W2050652072A5059404790 @default.
• W2050652072 hasAuthorship W2050652072A5064176073 @default.
• W2050652072 hasAuthorship W2050652072A5072913420 @default.
• W2050652072 hasAuthorship W2050652072A5080487700 @default.
• W2050652072 hasConcept C105163801 @default.
• W2050652072 hasConcept C106159729 @default.
• W2050652072 hasConcept C111337013 @default.
• W2050652072 hasConcept C111771559 @default.
• W2050652072 hasConcept C113196181 @default.
• W2050652072 hasConcept C120665830 @default.
• W2050652072 hasConcept C121332964 @default.
• W2050652072 hasConcept C124952713 @default.
• W2050652072 hasConcept C13274807 @default.
• W2050652072 hasConcept C142362112 @default.
• W2050652072 hasConcept C147120987 @default.
• W2050652072 hasConcept C162324750 @default.
• W2050652072 hasConcept C168834538 @default.
• W2050652072 hasConcept C171250308 @default.
• W2050652072 hasConcept C178790620 @default.
• W2050652072 hasConcept C185544564 @default.
• W2050652072 hasConcept C185592680 @default.
• W2050652072 hasConcept C192562407 @default.
• W2050652072 hasConcept C200274948 @default.
• W2050652072 hasConcept C204223013 @default.
• W2050652072 hasConcept C2777630638 @default.
• W2050652072 hasConcept C2779227376 @default.
• W2050652072 hasConcept C2780583480 @default.
• W2050652072 hasConcept C49040817 @default.
• W2050652072 hasConcept C53524968 @default.
• W2050652072 hasConcept C95312477 @default.
• W2050652072 hasConceptScore W2050652072C105163801 @default.
• W2050652072 hasConceptScore W2050652072C106159729 @default.
• W2050652072 hasConceptScore W2050652072C111337013 @default.
• W2050652072 hasConceptScore W2050652072C111771559 @default.
• W2050652072 hasConceptScore W2050652072C113196181 @default.
• W2050652072 hasConceptScore W2050652072C120665830 @default.
• W2050652072 hasConceptScore W2050652072C121332964 @default.
• W2050652072 hasConceptScore W2050652072C124952713 @default.
• W2050652072 hasConceptScore W2050652072C13274807 @default.
• W2050652072 hasConceptScore W2050652072C142362112 @default.
• W2050652072 hasConceptScore W2050652072C147120987 @default.
• W2050652072 hasConceptScore W2050652072C162324750 @default.
• W2050652072 hasConceptScore W2050652072C168834538 @default.
• W2050652072 hasConceptScore W2050652072C171250308 @default.
• W2050652072 hasConceptScore W2050652072C178790620 @default.
• W2050652072 hasConceptScore W2050652072C185544564 @default.
• W2050652072 hasConceptScore W2050652072C185592680 @default.
• W2050652072 hasConceptScore W2050652072C192562407 @default.
• W2050652072 hasConceptScore W2050652072C200274948 @default.
• W2050652072 hasConceptScore W2050652072C204223013 @default.
• W2050652072 hasConceptScore W2050652072C2777630638 @default.
• W2050652072 hasConceptScore W2050652072C2779227376 @default.
• W2050652072 hasConceptScore W2050652072C2780583480 @default.
• W2050652072 hasConceptScore W2050652072C49040817 @default.
• W2050652072 hasConceptScore W2050652072C53524968 @default.
• W2050652072 hasConceptScore W2050652072C95312477 @default.

• next