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- W2050682144 abstract "Auger electron spectroscopy was carried out on a range of homogeneous SixGey (0.36 < x > 0.75, 0.25 < y > 0.64) films. Various methods of quantifying the composition of the respective films were examined, in terms of both the differential and the direct spectra. Amongst others, differentiation of the direct spectra was carried out by computational means. The removal of the background from the direct spectra by Shirley's inversion formula was investigated. In addition, any change in the composition of the films due to the variation of the inelastic mean free path formula (originated by Seah and Dench and that by Tanuma, Powell and Penn) was studied." @default.
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- W2050682144 date "1981-09-01" @default.
- W2050682144 modified "2023-09-26" @default.
- W2050682144 title "The influence of the background on the Auger signal in studies of film growth" @default.
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- W2050682144 doi "https://doi.org/10.1016/0040-6090(81)90685-4" @default.
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