Matches in SemOpenAlex for { <https://semopenalex.org/work/W2050744320> ?p ?o ?g. }
- W2050744320 endingPage "09LA19" @default.
- W2050744320 startingPage "09LA19" @default.
- W2050744320 abstract "Sputtering damage of SrRuO 3 (SRO) films prepared by RF magnetron sputtering under various growth pressures was investigated by Raman spectroscopy and X-ray photoemission spectroscopy (XPS). Phonon modes that were related to Ru and Sr ions changed and XPS spectra shifted with decreasing growth pressure. These results indicate that Sr ions switched place with Ru ions in SRO films when the SRO films had sputtering damage under low-growth-pressure sputtering condition as determined from Raman spectroscopy and XPS measurement. The antisite ion content increased with decreasing growth pressure. The resistivity of the SRO films also increased with increasing antisite ion content. The dynamics of sputtering damage revealed that the antisite Sr and Ru ions were formed in SRO films." @default.
- W2050744320 created "2016-06-24" @default.
- W2050744320 creator A5017693285 @default.
- W2050744320 creator A5023888355 @default.
- W2050744320 creator A5026488507 @default.
- W2050744320 creator A5049221958 @default.
- W2050744320 creator A5050745749 @default.
- W2050744320 creator A5058340611 @default.
- W2050744320 creator A5078971068 @default.
- W2050744320 creator A5083486570 @default.
- W2050744320 creator A5084245858 @default.
- W2050744320 date "2012-09-01" @default.
- W2050744320 modified "2023-09-25" @default.
- W2050744320 title "Investigation of Sputtering Damage in SrRuO$_{3}$ Films Prepared by Sputtering with Raman and X-ray Photoemission Spectroscopies" @default.
- W2050744320 cites W116879693 @default.
- W2050744320 cites W1589352483 @default.
- W2050744320 cites W1662418372 @default.
- W2050744320 cites W1814029018 @default.
- W2050744320 cites W1969180425 @default.
- W2050744320 cites W1975536430 @default.
- W2050744320 cites W1978852737 @default.
- W2050744320 cites W1979404250 @default.
- W2050744320 cites W1983197294 @default.
- W2050744320 cites W1985646715 @default.
- W2050744320 cites W1994502584 @default.
- W2050744320 cites W2004692472 @default.
- W2050744320 cites W2016443491 @default.
- W2050744320 cites W2024423777 @default.
- W2050744320 cites W2027318433 @default.
- W2050744320 cites W2035137453 @default.
- W2050744320 cites W2035154896 @default.
- W2050744320 cites W2038927914 @default.
- W2050744320 cites W2045511932 @default.
- W2050744320 cites W2048947843 @default.
- W2050744320 cites W2049733352 @default.
- W2050744320 cites W2064807083 @default.
- W2050744320 cites W2068738312 @default.
- W2050744320 cites W2069887591 @default.
- W2050744320 cites W2073754563 @default.
- W2050744320 cites W2073948514 @default.
- W2050744320 cites W2084846845 @default.
- W2050744320 cites W2124509169 @default.
- W2050744320 cites W2130156865 @default.
- W2050744320 cites W2132104219 @default.
- W2050744320 cites W2266694235 @default.
- W2050744320 cites W2794871772 @default.
- W2050744320 cites W66948092 @default.
- W2050744320 doi "https://doi.org/10.1143/jjap.51.09la19" @default.
- W2050744320 hasPublicationYear "2012" @default.
- W2050744320 type Work @default.
- W2050744320 sameAs 2050744320 @default.
- W2050744320 citedByCount "0" @default.
- W2050744320 crossrefType "journal-article" @default.
- W2050744320 hasAuthorship W2050744320A5017693285 @default.
- W2050744320 hasAuthorship W2050744320A5023888355 @default.
- W2050744320 hasAuthorship W2050744320A5026488507 @default.
- W2050744320 hasAuthorship W2050744320A5049221958 @default.
- W2050744320 hasAuthorship W2050744320A5050745749 @default.
- W2050744320 hasAuthorship W2050744320A5058340611 @default.
- W2050744320 hasAuthorship W2050744320A5078971068 @default.
- W2050744320 hasAuthorship W2050744320A5083486570 @default.
- W2050744320 hasAuthorship W2050744320A5084245858 @default.
- W2050744320 hasConcept C113196181 @default.
- W2050744320 hasConcept C120665830 @default.
- W2050744320 hasConcept C121332964 @default.
- W2050744320 hasConcept C145148216 @default.
- W2050744320 hasConcept C171250308 @default.
- W2050744320 hasConcept C175708663 @default.
- W2050744320 hasConcept C178790620 @default.
- W2050744320 hasConcept C185592680 @default.
- W2050744320 hasConcept C19067145 @default.
- W2050744320 hasConcept C192562407 @default.
- W2050744320 hasConcept C22423302 @default.
- W2050744320 hasConcept C40003534 @default.
- W2050744320 hasConcept C43617362 @default.
- W2050744320 hasConcept C46141821 @default.
- W2050744320 hasConcept C51286037 @default.
- W2050744320 hasConcept C61427134 @default.
- W2050744320 hasConceptScore W2050744320C113196181 @default.
- W2050744320 hasConceptScore W2050744320C120665830 @default.
- W2050744320 hasConceptScore W2050744320C121332964 @default.
- W2050744320 hasConceptScore W2050744320C145148216 @default.
- W2050744320 hasConceptScore W2050744320C171250308 @default.
- W2050744320 hasConceptScore W2050744320C175708663 @default.
- W2050744320 hasConceptScore W2050744320C178790620 @default.
- W2050744320 hasConceptScore W2050744320C185592680 @default.
- W2050744320 hasConceptScore W2050744320C19067145 @default.
- W2050744320 hasConceptScore W2050744320C192562407 @default.
- W2050744320 hasConceptScore W2050744320C22423302 @default.
- W2050744320 hasConceptScore W2050744320C40003534 @default.
- W2050744320 hasConceptScore W2050744320C43617362 @default.
- W2050744320 hasConceptScore W2050744320C46141821 @default.
- W2050744320 hasConceptScore W2050744320C51286037 @default.
- W2050744320 hasConceptScore W2050744320C61427134 @default.
- W2050744320 hasIssue "9S1" @default.
- W2050744320 hasLocation W20507443201 @default.
- W2050744320 hasOpenAccess W2050744320 @default.
- W2050744320 hasPrimaryLocation W20507443201 @default.