Matches in SemOpenAlex for { <https://semopenalex.org/work/W2050753360> ?p ?o ?g. }
Showing items 1 to 94 of
94
with 100 items per page.
- W2050753360 endingPage "1996" @default.
- W2050753360 startingPage "1996" @default.
- W2050753360 abstract "This paper reports a study on the mechanism involved in depositing SiN x films at very high rates by using 40 MHz discharge SiH 4 /NH 3 /N 2 plasma enhanced chemical vapor deposition (PECVD). The quality of the films is comparable to that of films deposited at low rates at a conventional 13.56 MHz frequency. From film deposition experiments, plasma diagnostic studies, and analytical calculation for both frequencies, we have found that the mechanism of depositing SiN x films at very high rates with a 40 MHz discharge can be explained by the higher dissociation efficiency of both NH 3 gas and SiH 4 gas than at a conventional 13.56 MHz. We also report the performance of a thin film transistor (TFT), applicable to LCD switching devices, that was fabricated with SiN x film deposited at the high rate of 350 nm/min with a 40 MHz frequency." @default.
- W2050753360 created "2016-06-24" @default.
- W2050753360 creator A5037064019 @default.
- W2050753360 creator A5047707823 @default.
- W2050753360 creator A5076193170 @default.
- W2050753360 date "1998-04-01" @default.
- W2050753360 modified "2023-09-27" @default.
- W2050753360 title "The Mechanism at Work in 40 MHz Discharge SiH<sub>4</sub>/NH<sub>3</sub>/N<sub>2</sub> Plasma Chemical Vapor Deposition of SiN<sub>x</sub> Films at Very High Rates" @default.
- W2050753360 cites W1972302135 @default.
- W2050753360 cites W1976158397 @default.
- W2050753360 cites W2012077280 @default.
- W2050753360 cites W2040875144 @default.
- W2050753360 cites W2058902950 @default.
- W2050753360 cites W2070231015 @default.
- W2050753360 cites W2079776164 @default.
- W2050753360 cites W2083431783 @default.
- W2050753360 cites W2083976024 @default.
- W2050753360 cites W2128515999 @default.
- W2050753360 cites W4239843603 @default.
- W2050753360 cites W4240358796 @default.
- W2050753360 doi "https://doi.org/10.1143/jjap.37.1996" @default.
- W2050753360 hasPublicationYear "1998" @default.
- W2050753360 type Work @default.
- W2050753360 sameAs 2050753360 @default.
- W2050753360 citedByCount "15" @default.
- W2050753360 countsByYear W20507533602013 @default.
- W2050753360 countsByYear W20507533602014 @default.
- W2050753360 countsByYear W20507533602019 @default.
- W2050753360 countsByYear W20507533602021 @default.
- W2050753360 crossrefType "journal-article" @default.
- W2050753360 hasAuthorship W2050753360A5037064019 @default.
- W2050753360 hasAuthorship W2050753360A5047707823 @default.
- W2050753360 hasAuthorship W2050753360A5076193170 @default.
- W2050753360 hasConcept C102931765 @default.
- W2050753360 hasConcept C113196181 @default.
- W2050753360 hasConcept C121332964 @default.
- W2050753360 hasConcept C147789679 @default.
- W2050753360 hasConcept C151730666 @default.
- W2050753360 hasConcept C171250308 @default.
- W2050753360 hasConcept C185592680 @default.
- W2050753360 hasConcept C19067145 @default.
- W2050753360 hasConcept C192562407 @default.
- W2050753360 hasConcept C2779227376 @default.
- W2050753360 hasConcept C2816523 @default.
- W2050753360 hasConcept C38347018 @default.
- W2050753360 hasConcept C43617362 @default.
- W2050753360 hasConcept C49040817 @default.
- W2050753360 hasConcept C57410435 @default.
- W2050753360 hasConcept C62520636 @default.
- W2050753360 hasConcept C64297162 @default.
- W2050753360 hasConcept C82706917 @default.
- W2050753360 hasConcept C86803240 @default.
- W2050753360 hasConcept C87359718 @default.
- W2050753360 hasConceptScore W2050753360C102931765 @default.
- W2050753360 hasConceptScore W2050753360C113196181 @default.
- W2050753360 hasConceptScore W2050753360C121332964 @default.
- W2050753360 hasConceptScore W2050753360C147789679 @default.
- W2050753360 hasConceptScore W2050753360C151730666 @default.
- W2050753360 hasConceptScore W2050753360C171250308 @default.
- W2050753360 hasConceptScore W2050753360C185592680 @default.
- W2050753360 hasConceptScore W2050753360C19067145 @default.
- W2050753360 hasConceptScore W2050753360C192562407 @default.
- W2050753360 hasConceptScore W2050753360C2779227376 @default.
- W2050753360 hasConceptScore W2050753360C2816523 @default.
- W2050753360 hasConceptScore W2050753360C38347018 @default.
- W2050753360 hasConceptScore W2050753360C43617362 @default.
- W2050753360 hasConceptScore W2050753360C49040817 @default.
- W2050753360 hasConceptScore W2050753360C57410435 @default.
- W2050753360 hasConceptScore W2050753360C62520636 @default.
- W2050753360 hasConceptScore W2050753360C64297162 @default.
- W2050753360 hasConceptScore W2050753360C82706917 @default.
- W2050753360 hasConceptScore W2050753360C86803240 @default.
- W2050753360 hasConceptScore W2050753360C87359718 @default.
- W2050753360 hasIssue "4R" @default.
- W2050753360 hasLocation W20507533601 @default.
- W2050753360 hasOpenAccess W2050753360 @default.
- W2050753360 hasPrimaryLocation W20507533601 @default.
- W2050753360 hasRelatedWork W1503002209 @default.
- W2050753360 hasRelatedWork W1971984726 @default.
- W2050753360 hasRelatedWork W2003971460 @default.
- W2050753360 hasRelatedWork W2081386835 @default.
- W2050753360 hasRelatedWork W2110560560 @default.
- W2050753360 hasRelatedWork W2379688728 @default.
- W2050753360 hasRelatedWork W2618040075 @default.
- W2050753360 hasRelatedWork W3144697431 @default.
- W2050753360 hasRelatedWork W778132138 @default.
- W2050753360 hasRelatedWork W2152946510 @default.
- W2050753360 hasVolume "37" @default.
- W2050753360 isParatext "false" @default.
- W2050753360 isRetracted "false" @default.
- W2050753360 magId "2050753360" @default.
- W2050753360 workType "article" @default.