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- W2050901158 abstract "Planar doping of GaAs by metalorganic vapor phase epitaxy, involving the suspension of growth whilst the doping gas is introduced, is investigated to synthesize complex free-carrier profiles. Silicon is used as a dopant. It deposits on the non-growing surface and is subsequently incorporated as a planar region of doping. It is shown that free-carrier profiles can be produced by including dopant planes in the epitaxial layer." @default.
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- W2050901158 date "1984-09-01" @default.
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- W2050901158 title "Planar doping by interrupted MOVPE growth of GaAs" @default.
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- W2050901158 doi "https://doi.org/10.1016/0022-0248(84)90390-7" @default.
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