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• W2050956411 abstract "Multi-walled carbonnanotubes (MWCNTs) were grown by plasma-enhanced chemical vapor deposition(PECVD) in a bell jar reactor. A mixture of methane and hydrogen (CH4/H2)was decomposed over Ni catalyst previously deposited on Si-wafer by thermionicvacuum arc (TVA) technology. The growth parameters were optimized to obtaindense arrays of nanotubes and were found to be: hydrogen flow rate of 90 sccm;methane flow rate of 10 sccm; oxygen flow rate of 1 sccm; substrate temperatureof 1123 K; total pressure of 10 mbar and microwave power of 342 Watt. Resultsare summarized and significant main factors and their interactions wereidentified. In addition a computational study of nanotubes growth rate wasconducted using a gas phase reaction mechanism and surface nanotube formationmodel. Simulations were performed to determine the gas phase fields fortemperature and species concentration as well as the surface-species coverageand carbon nanotubes growth rate. A kinetic mechanism which consists of 13 gasspecies, 43 gas reactions and 17 surface reactions has been used in thecommercial computational fluid dynamics (CFD) software ANSYS Fluent. Acomparison of simulated and experimental growth rate is presented in thispaper. Simulation results agreed favorably with experimental data." @default.
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• W2050956411 date "2014-01-01" @default.
• W2050956411 modified "2023-09-26" @default.
• W2050956411 title "Microwave Plasma Enhanced Chemical Vapor Deposition of Carbon Nanotubes" @default.
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• W2050956411 doi "https://doi.org/10.4236/jsemat.2014.44023" @default.
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