Matches in SemOpenAlex for { <https://semopenalex.org/work/W2050972438> ?p ?o ?g. }
Showing items 1 to 91 of
91
with 100 items per page.
- W2050972438 endingPage "710" @default.
- W2050972438 startingPage "705" @default.
- W2050972438 abstract "Thin films of BN have been deposited on silicon substrates in the temperature range of 600 to 900 °C by supersonic molecular jet epitaxy and plasma-assisted MOCVD using new organoboron precursors such as borane-triethylamine complex (BTEA) and tris(sec-butyl)borane (TSBB). Hydrogen was used as carrier gas, and additional nitrogen and ammonia as reactive gases were supplied by either through nozzle or via remoted plasma. Crack-free, polycrystalline hexagonal BN films with nano-size crystals were successfully grown at temperature as low as 750 °C using BTEA. With increasing substrate temperatures to 900 °C, however, the h-BN films chenged polycrystalline with smoother surface and larger crystals. The changes of relative film quality with deposition temperature and reactive gas have been confirmed with FTIR. Nitrogen plasma enhanced the film quality and the stoichiometry, and removed the surface carbon effectively rather than ammonia and hydrogen plasmas molecular beam. Wide band gaps were calculated using optical transmittance measurements." @default.
- W2050972438 created "2016-06-24" @default.
- W2050972438 creator A5068908992 @default.
- W2050972438 creator A5082551719 @default.
- W2050972438 creator A5085589113 @default.
- W2050972438 date "1999-11-01" @default.
- W2050972438 modified "2023-09-24" @default.
- W2050972438 title "Growth of Boron Nitride Thin Films on Silicon Substrates Using New Organoboron Precursors" @default.
- W2050972438 cites W1967669375 @default.
- W2050972438 cites W1975927393 @default.
- W2050972438 cites W1976131242 @default.
- W2050972438 cites W1989306148 @default.
- W2050972438 cites W1993047006 @default.
- W2050972438 cites W1993769974 @default.
- W2050972438 cites W2002458298 @default.
- W2050972438 cites W2006080450 @default.
- W2050972438 cites W2009703595 @default.
- W2050972438 cites W2012133167 @default.
- W2050972438 cites W2017195300 @default.
- W2050972438 cites W2019137627 @default.
- W2050972438 cites W2025282030 @default.
- W2050972438 cites W2043012222 @default.
- W2050972438 cites W2077746395 @default.
- W2050972438 cites W2079772003 @default.
- W2050972438 cites W2141487562 @default.
- W2050972438 doi "https://doi.org/10.1002/(sici)1521-396x(199911)176:1<705::aid-pssa705>3.0.co;2-m" @default.
- W2050972438 hasPublicationYear "1999" @default.
- W2050972438 type Work @default.
- W2050972438 sameAs 2050972438 @default.
- W2050972438 citedByCount "6" @default.
- W2050972438 countsByYear W20509724382016 @default.
- W2050972438 countsByYear W20509724382018 @default.
- W2050972438 crossrefType "journal-article" @default.
- W2050972438 hasAuthorship W2050972438A5068908992 @default.
- W2050972438 hasAuthorship W2050972438A5082551719 @default.
- W2050972438 hasAuthorship W2050972438A5085589113 @default.
- W2050972438 hasConcept C111368507 @default.
- W2050972438 hasConcept C113196181 @default.
- W2050972438 hasConcept C127313418 @default.
- W2050972438 hasConcept C137637335 @default.
- W2050972438 hasConcept C171250308 @default.
- W2050972438 hasConcept C178790620 @default.
- W2050972438 hasConcept C185592680 @default.
- W2050972438 hasConcept C19067145 @default.
- W2050972438 hasConcept C191897082 @default.
- W2050972438 hasConcept C192562407 @default.
- W2050972438 hasConcept C202189072 @default.
- W2050972438 hasConcept C2777289219 @default.
- W2050972438 hasConcept C2778470625 @default.
- W2050972438 hasConcept C49040817 @default.
- W2050972438 hasConcept C512968161 @default.
- W2050972438 hasConcept C544956773 @default.
- W2050972438 hasConcept C57410435 @default.
- W2050972438 hasConceptScore W2050972438C111368507 @default.
- W2050972438 hasConceptScore W2050972438C113196181 @default.
- W2050972438 hasConceptScore W2050972438C127313418 @default.
- W2050972438 hasConceptScore W2050972438C137637335 @default.
- W2050972438 hasConceptScore W2050972438C171250308 @default.
- W2050972438 hasConceptScore W2050972438C178790620 @default.
- W2050972438 hasConceptScore W2050972438C185592680 @default.
- W2050972438 hasConceptScore W2050972438C19067145 @default.
- W2050972438 hasConceptScore W2050972438C191897082 @default.
- W2050972438 hasConceptScore W2050972438C192562407 @default.
- W2050972438 hasConceptScore W2050972438C202189072 @default.
- W2050972438 hasConceptScore W2050972438C2777289219 @default.
- W2050972438 hasConceptScore W2050972438C2778470625 @default.
- W2050972438 hasConceptScore W2050972438C49040817 @default.
- W2050972438 hasConceptScore W2050972438C512968161 @default.
- W2050972438 hasConceptScore W2050972438C544956773 @default.
- W2050972438 hasConceptScore W2050972438C57410435 @default.
- W2050972438 hasIssue "1" @default.
- W2050972438 hasLocation W20509724381 @default.
- W2050972438 hasOpenAccess W2050972438 @default.
- W2050972438 hasPrimaryLocation W20509724381 @default.
- W2050972438 hasRelatedWork W1983027008 @default.
- W2050972438 hasRelatedWork W1996283667 @default.
- W2050972438 hasRelatedWork W2025051414 @default.
- W2050972438 hasRelatedWork W2035384402 @default.
- W2050972438 hasRelatedWork W2064994547 @default.
- W2050972438 hasRelatedWork W2067091810 @default.
- W2050972438 hasRelatedWork W2187139149 @default.
- W2050972438 hasRelatedWork W2978086284 @default.
- W2050972438 hasRelatedWork W2994448536 @default.
- W2050972438 hasRelatedWork W4210256258 @default.
- W2050972438 hasVolume "176" @default.
- W2050972438 isParatext "false" @default.
- W2050972438 isRetracted "false" @default.
- W2050972438 magId "2050972438" @default.
- W2050972438 workType "article" @default.