Matches in SemOpenAlex for { <https://semopenalex.org/work/W2051153605> ?p ?o ?g. }
Showing items 1 to 86 of
86
with 100 items per page.
- W2051153605 abstract "Templates for UV-Nano-imprint lithography (NIL) have been rapidly improved these days. Feature sizes of the templates have come to be less than 30 nm. Consequently, metrology has been also one of the challenges to fabricate templates for UV-NIL. There are many issues in metrology for the templates; for instance, necessity of the higher resolution, critical dimension (CD) accuracy and repeatability for measurement tools. In this paper, we will focus on an optimization of measuring conditions for the templates of UV-NIL. And we will discuss some measuring techniques for CD precision and repeatability using a CD-SEM and a scanning probe microscope." @default.
- W2051153605 created "2016-06-24" @default.
- W2051153605 creator A5005110163 @default.
- W2051153605 creator A5020688961 @default.
- W2051153605 creator A5026604772 @default.
- W2051153605 creator A5070418426 @default.
- W2051153605 creator A5077380899 @default.
- W2051153605 creator A5080510255 @default.
- W2051153605 creator A5088363151 @default.
- W2051153605 creator A5039091884 @default.
- W2051153605 date "2008-05-30" @default.
- W2051153605 modified "2023-09-23" @default.
- W2051153605 title "Optimization of measuring conditions for templates of UV nano imprint lithography" @default.
- W2051153605 doi "https://doi.org/10.1117/12.793072" @default.
- W2051153605 hasPublicationYear "2008" @default.
- W2051153605 type Work @default.
- W2051153605 sameAs 2051153605 @default.
- W2051153605 citedByCount "0" @default.
- W2051153605 crossrefType "proceedings-article" @default.
- W2051153605 hasAuthorship W2051153605A5005110163 @default.
- W2051153605 hasAuthorship W2051153605A5020688961 @default.
- W2051153605 hasAuthorship W2051153605A5026604772 @default.
- W2051153605 hasAuthorship W2051153605A5039091884 @default.
- W2051153605 hasAuthorship W2051153605A5070418426 @default.
- W2051153605 hasAuthorship W2051153605A5077380899 @default.
- W2051153605 hasAuthorship W2051153605A5080510255 @default.
- W2051153605 hasAuthorship W2051153605A5088363151 @default.
- W2051153605 hasConcept C105487726 @default.
- W2051153605 hasConcept C120665830 @default.
- W2051153605 hasConcept C121332964 @default.
- W2051153605 hasConcept C136525101 @default.
- W2051153605 hasConcept C142724271 @default.
- W2051153605 hasConcept C154020017 @default.
- W2051153605 hasConcept C159985019 @default.
- W2051153605 hasConcept C162117346 @default.
- W2051153605 hasConcept C171250308 @default.
- W2051153605 hasConcept C185592680 @default.
- W2051153605 hasConcept C192562407 @default.
- W2051153605 hasConcept C195766429 @default.
- W2051153605 hasConcept C204223013 @default.
- W2051153605 hasConcept C204787440 @default.
- W2051153605 hasConcept C207789793 @default.
- W2051153605 hasConcept C2780357685 @default.
- W2051153605 hasConcept C41008148 @default.
- W2051153605 hasConcept C43617362 @default.
- W2051153605 hasConcept C49040817 @default.
- W2051153605 hasConcept C71924100 @default.
- W2051153605 hasConcept C82714645 @default.
- W2051153605 hasConceptScore W2051153605C105487726 @default.
- W2051153605 hasConceptScore W2051153605C120665830 @default.
- W2051153605 hasConceptScore W2051153605C121332964 @default.
- W2051153605 hasConceptScore W2051153605C136525101 @default.
- W2051153605 hasConceptScore W2051153605C142724271 @default.
- W2051153605 hasConceptScore W2051153605C154020017 @default.
- W2051153605 hasConceptScore W2051153605C159985019 @default.
- W2051153605 hasConceptScore W2051153605C162117346 @default.
- W2051153605 hasConceptScore W2051153605C171250308 @default.
- W2051153605 hasConceptScore W2051153605C185592680 @default.
- W2051153605 hasConceptScore W2051153605C192562407 @default.
- W2051153605 hasConceptScore W2051153605C195766429 @default.
- W2051153605 hasConceptScore W2051153605C204223013 @default.
- W2051153605 hasConceptScore W2051153605C204787440 @default.
- W2051153605 hasConceptScore W2051153605C207789793 @default.
- W2051153605 hasConceptScore W2051153605C2780357685 @default.
- W2051153605 hasConceptScore W2051153605C41008148 @default.
- W2051153605 hasConceptScore W2051153605C43617362 @default.
- W2051153605 hasConceptScore W2051153605C49040817 @default.
- W2051153605 hasConceptScore W2051153605C71924100 @default.
- W2051153605 hasConceptScore W2051153605C82714645 @default.
- W2051153605 hasLocation W20511536051 @default.
- W2051153605 hasOpenAccess W2051153605 @default.
- W2051153605 hasPrimaryLocation W20511536051 @default.
- W2051153605 hasRelatedWork W1520139605 @default.
- W2051153605 hasRelatedWork W1998341457 @default.
- W2051153605 hasRelatedWork W2017500397 @default.
- W2051153605 hasRelatedWork W2019113157 @default.
- W2051153605 hasRelatedWork W2034605818 @default.
- W2051153605 hasRelatedWork W2051153605 @default.
- W2051153605 hasRelatedWork W2093991569 @default.
- W2051153605 hasRelatedWork W2136528575 @default.
- W2051153605 hasRelatedWork W3153204912 @default.
- W2051153605 hasRelatedWork W34889286 @default.
- W2051153605 isParatext "false" @default.
- W2051153605 isRetracted "false" @default.
- W2051153605 magId "2051153605" @default.
- W2051153605 workType "article" @default.